Membranes

We fabricate versatile types of membranes. Shape, size and material can be different. In addition, the membrane can be either structured to create stencils or a thin Cr-absorber film on top of the Si₃N₄ membrane can be patterned.

Membrane with a diameter of 127 mm, 2 µm thick and a minimum feature size of 200 nm

Stencil mask with a 15 mm diameter patterned membrane and a clear area in the center

Sets of Si₃N₄ membranes with patterned Cr absorber

Contact

For further information, please contact: Florian Letzkus