We fabricate versatile types of membranes. Shape, size and material can be different. In addition, the membrane can be either structured to create stencils or a thin Cr-absorber film on top of the Si3N4 membrane can be patterned.
Membrane with a diameter of 127 mm, 2 µm thick and a minimum feature size of 200 nm
Stencil mask with a 15 mm diameter patterned membrane and a clear area in the center
Sets of Si3N4 membranes with patterned Cr absorber