• SPIE Advanced Lithography 2021
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  • Deutscher Zukunftspreis 2020 for EUV technology
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  • Webinar IMS CHIPS 2020
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  • Newsletter issue 2 2020
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  • Nature magazine article: CMOS chip from IMS CHIPS as hologram projector
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Institut für Mikroelektronik Stuttgart Allmandring 30a / 70569 Stuttgart /
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