- SPIE Advanced Lithography 2021
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- Deutscher Zukunftspreis 2020 for EUV technology
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- Webinar IMS CHIPS 2020
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- Newsletter issue 2 2020
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- Nature magazine article: CMOS chip from IMS CHIPS as hologram projector
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Institut für Mikroelektronik Stuttgart
Allmandring 30a / 70569 Stuttgart /
Phone: +49 711 21855-0 / Fax: -111