The M(E)MS technology division is divided into the following areas of activity: Large-scale M(EMS) and Si photonics. These two primary activities develop and manufacture micro mechanic Si components, optoelectronic micro systems for beam deflection and active/passive photonic Si and Si3N4 components. By combining M(E)MS, CMOS and nano structuring processes new types of prototypes and systems can be realized in a fast and cost-efficient manner.
The division carries out application-oriented research, development and small series manufacture for publicly-funded projects and predominately bilateral industrial projects.
The manufacture of photonic and micro electro mechanic components, from an individual sample to a small series, is displayed in this division. This requires all core competences at Institut fÃ¼r Mikroelektronik Stuttgart, such as designing, technological processing, packaging and testing in order to develop and manufacture complex micro systems.