Business areas


The M(E)MS technology division is divided into the following areas of activity: Large-scale M(EMS) and Si photonics. These two primary activities develop and manufacture micro mechanic Si components, optoelectronic micro systems for beam deflection and active/passive photonic Si and Si3N4 components. By combining M(E)MS, CMOS and nano structuring processes new types of prototypes and systems can be realized in a fast and cost-efficient manner.

The division carries out application-oriented research, development and small series manufacture for publicly-funded projects and predominately bilateral industrial projects.

The manufacture of photonic and micro electro mechanic components, from an individual sample to a small series, is displayed in this division. This requires all core competences at Institut für Mikroelektronik Stuttgart, such as designing, technological processing, packaging and testing in order to develop and manufacture complex micro systems.

For further information, please contact: Florian Letzkus