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SPIE Advanced Lithography 2021
February 22 - 27, 2021
The IMS is represented with a lecture at the SPIE Advanced Lithography 2021 in San Jose, USA.
Session 6: Novel Resist Concepts and Track Processes
„Multidimensional process optimization of a negative e-beam photoresist for silicon-waveguide manufacturing“
Markus Greul, Holger Sailer, Mathias Kaschel, Joachim N. Burghartz
The presentation will be available for viewing the entire week of 22 - 26 February 2021.
For further information on the MOS-AK workshop, please go the following website: https://spie.org/conferences-and-exhibitions/advanced-lithography?SSO=1
Location: San Jose, California, United States, Digital Forum, Online Only
Deutscher Zukunftspreis 2020 for EUV technology
November 24, 2020

The Baden-Württemberg Minister of Economic Affairs congratulates companies on award
Minister of Economic Affairs, Dr. Nicole Hoffmeister-Kraut, has congratulated the Zeiss company in Oberkochen and the Ditzingen-based Trumpf company on being awarded the Deutscher Zukunftspreis 2020 by the German president.
"With their outstanding research work, Zeiss and Trumpf, together with the Dutch company ASML and many other partners, have succeeded in making decisive progress in the production of modern microchips. They have thus overcome an important hurdle on the way to faster processing of large amounts of data in artificial intelligence applications. Being awarded the Zukunftspreis is proof of the outstanding innovative strength of Baden-Württemberg's industry and business-related research facilities," said the Minister today (November 26th). The Zeiss company works in a close partnership with the Institut für Mikroelektronik Stuttgart (IMS CHIPS).
In contrast to conventional optical lithography, the EUV imaging system from ZEISS is not based on lenses but on mirrors. These high-precision mirrors from Oberkochen can have a diameter of up to one meter and require curvature accuracies in a nanometer range. In order to be able to measure these mirrors, individually manufactured high-precision Computer Generated Holograms (CGHs) are required, which are produced at Institut für Mikroelektronik Stuttgart (IMS CHIPS) using a unique technology. With their state-of-the-art equipment, such as electron beam writers and dedicated experts, it is possible at IMS CHIPS to also provide very large quartz substrates with structure sizes in the range below 100 nanometers. This in turn enables ZEISS to measure mirrors of the most diverse geometries with the required precision. IMS CHIPS, a member of the Innovationsallianz Baden-Württemberg (innBW), is one of ZEISS' key partners.
Press release of the Minister of Economic Affairs, Dr. Nicole Hoffmeister-Kraut on the German Future Prize
Further reference:
Deutscher Zukunftspreis
Press Release Bundesforschungsministeriums
Press Release Trumpf
Press Release ZEISS
Webinar IMS CHIPS 2020
November 19, 2020
On 19 November 2020 IMS CHIPS organized a free Webinar with IMS experts.
Due to the worldwide Covid 19 situation, the 18th Beams & More workshop, which was scheduled for November 19, could not take place.
The presentations cover highlights like results from our new laser writer, the extension of our photonic activities or current process developments at IMS CHIPS.
Lectures:
- HIMT ULTRA - a new state-of-the-art Laser Writer at IMS CHIPS – Holger Sailer
- Datafiles and -formats for Lithography at IMS CHIPS – Stephan Martens
- Silicon Photonics: Integrated photonics for sensing applications – Mathias Kaschel
- HySiF – Hybrid Systems in Foil – Björn Albrecht
- Silicon energy filters for single step implantations of SiC substrates – Tamas Steinbach
- Si (111) deep etching for GaN applications – Matthias Moser
- Closing remarks/Outlook 2021 – Julian Hartbaum
Newsletter issue 2 2020
November 06, 2020
We present our IMS newsletter.
In this newsletter (issue 2, 2020) we would like to give you some highlights of our ongoing activities at the Institut fuer Mikroelektronik Stuttgart. The topics of the current issue are:
POSITION II – pilot line for the next generation of intelligent catheters and implants
New innovation and the introduction of open technology platforms provide the foundation for the next generation of catheter and implants. Miniaturization, signal acquisition as close as possible to the object, wireless communication and adapted encapsulation play a central role.
ZIM project Fiber Coupling
Within the ZIM joined project, a fast and precise assembly technique to connect optical fibers to optical chips is being developed. For this purpose,
guide structures for the glass fiber absorption on the silicon are manufactured using a laser and etching process.
Modernization of wet chemistry and upgrade to 200 mm line
At IMS CHIPS a gradual replacement of the wet chemical equipment has been taking place since 2019. The new line includes state-of-the-art machines with increased cleaning efficiency and improved quality control. The newly purchased equipment enables the fully automatic processing of wafers with diameters of up to 200 mm with higher throughput, optimized reproducibility and a safe execution of wet etching and cleaning processes.
HDRC®-AeroPantoCam – a sensor system for visual and thermal monitoring of railed vehicle pantographs
A torn overhead line causes train cancellations and delays. Within the ZIM joint project HDRC®-AeroPantoCam IMS CHIPS and the project partners KST and Gevitec are developing a novel and extremely robust sensor system for visual and thermal monitoring of the pantographs of rail vehicles in outdoor areas.
Our current IMS Newsletter can be found under Publications - Current publications.
Nature magazine article: CMOS chip from IMS CHIPS as hologram projector
September 10, 2020

Scientists at Max Planck Institute for Intelligent Systems and the University of Stuttgart developed an ultrasonic projector for high-resolution moving holographic images. The researchers now report on this in an article in the renowned Nature magazine.
The ultrasound projector is based on a special microchip that was developed and manufactured at Institut für Mikroelektronik Stuttgart. The chip has thousands of tiny gold-plated electrodes, which are arranged as a matrix on the chip surface and can be digitally controlled via electronics integrated in the chip. This way, microbubbles can be generated precisely in liquid above the electrodes, which in turn can be used to spatially modulate ultrasonic waves, resulting in a holographic image impression. Since the so-called "microbubbles" can be switched on and off digitally in rapid succession via the chip, holographic videos can be reproduced with a spatial image impression
The original publication can be found on www.nature.com
For further information, please go:
University of Stuttgart
Max Planck Institute for Intelligent Systems
Microsystems for AI - AI for Microsystems: from neuromorphic hardware and intelligent sensor technology
December 03, 2020 more ...
8th Electronics System-Integration Technology Conference ESTC 2020, Vestfold, Norway
September 15 - 18, 2020 more ...
IEEE International Conference on Flexible and Printable Sensors and Systems 2020, Manchester, UK
August 16 - 19, 2020 more ...
Sensor technology of the future - hardware/software innovations and artificial intelligence
June 29, 2020 more ...
PanaMEA – intelligent blood sugar level monitoring
June 29, 2020 more ...
Innovationsallianz Baden-Württemberg receives office in Stuttgart and founds association
June 24, 2020 more ...
Newsletter issue 1 2020
May 15, 2020 more ...
"100 places for industry 4.0 live experience" at IMS CHIPS is postponed
April 01, 2020 more ...
microTEC Südwest cluster conference postponed to September 21-22, 2020
March 18 - 19, 2020 more ...
Joint Spring MOS-AK Workshop and IEEE EDS Mini-Colloquium on „Non-conventional Devices and Technologies“ cancelled
March 17 - 18, 2020 more ...
Future cluster “QSens” - Quantum sensors for the future
March 16, 2020 more ...
Hardware AI: Use cases and requirements from the perspective of medium-sized businesses
February 18, 2020 more ...
INOSENS - Research on an innovative optical rotation angle sensor
January 23, 2020 more ...
Season´s Greetings
December 14, 2019 more ...
17th expert group meeting Micro Medical Technology: minimal invasive diagnostics
December 03, 2019 more ...
Kretschmann on a delegation trip to Paris
November 20, 2019 more ...
Ministry of Economics supports Institute for Microelectronics Stuttgart
November 20, 2019 more ...
Commemoration of “5 years of Allianz Industrie 4.0 Baden-Württemberg”
November 18, 2019 more ...
17th Workshop "Beams and More" 2019
November 14, 2019 more ...
MikroSystemTechnik Congress 2019 in Berlin
October 28 - 30, 2019 more ...
The 18th IEEE Conference on Sensors 2019
October 27 - 30, 2019 more ...
45th meeting of the user group Hot Processes and RTP and 61st meeting of the user group Ion implantation
October 23 - 24, 2019 more ...
Newsletter issue 2 2019
October 16, 2019 more ...
Microelectronics technology workshop
October 09 - 11, 2019 more ...
45th International Conference on Micro & Nano Engineering 2019
September 23 - 26, 2019 more ...
Workshop Chip Design Management for Users and Customers
July 08, 2019 more ...
13th International Conference on Nitride Semiconductors (ICNS-13)
July 07 - 12, 2019 more ...
State Technology Festival 2019 at the VDI House in Stuttgart
June 29, 2019 more ...
Ministry of Economics funds joint project "Microelectronics for Artificial Intelligence" with around two million euros
June 28, 2019 more ...
Transducers 2019 - EUROSENSORS XXXIII
June 23 - 27, 2019 more ...
VDC TZ Meetup on Digtal Change
May 23, 2019 more ...
IMS CHIPS received the Dürr Supplier Award 2019
May 16, 2019 more ...
Particle sensor - developing a highly-integrated portable system for real-time analysis of the ambient air
April 24, 2019 more ...
IDTechEx Show! 2019
April 10 - 11, 2019 more ...
NILindustrialday 2018
March 28 - 29, 2019 more ...
Economy meets science - step by step towards digitised production
March 27, 2019 more ...
CS International Conference 2019
March 26 - 27, 2019 more ...
Newsletter issue 1 2019
March 22, 2019 more ...
“Mikroelektronik für Industrie 4.0” conference
March 21 - 22, 2019 more ...
microTEC Südwest Clusterkonferenz 2019
March 20 - 21, 2019 more ...
11. Innovation Forum Smarte Technologien & Systeme
March 14, 2019 more ...
Forschungsseminar/EDS Webinar
March 13, 2019 more ...
MOCVD 4.2 project launch
January 01, 2019 more ...
HDRC-AeroPantoCam - sensor system for visual and thermal monitoring of railed vehicle pantographs
December 13, 2018 more ...
EVG Bio & Photonics Device Manufacturing Workshop 2018
December 10, 2018 more ...
Baden-Württemberg´s Ministry of Economics supporting upgrade measurements with 1.3 million euros at Institut für Mikroelektronik
November 30, 2018 more ...
16th Workshop "Beams and More" 2018
November 15, 2018 more ...
International Workshop on Nitride Semiconductors 2018 (IWN)
November 11, 2018 more ...
The “Fiber Coupling” ZIM project was launched November 1st, 2018
November 01, 2018 more ...
Microelectronics technology workshop
October 10 - 12, 2018 more ...
FLEXMAX project - flexible active sensor matrix for medical applications
October 05, 2018 more ...
The BMBF sponsored project “OPALID” was launched October 1st, 2018
October 01, 2018 more ...
U.R.S.I. Kleinheubacher Tagung 2018
September 24 - 26, 2018 more ...
EDS Newsletter Technical Article Series “Marvels of Microelectronic Engineering”
September 21, 2018 more ...
32nd EUROSENSORS Conference 2018
September 09, 2018 - September 12, 2019 more ...
ESSDERC 2018 - 48th European Solid-State Device Research Conference in Dresden
September 03 - 06, 2018 more ...
POSITION-II - A pilot line for the next generation of smart catheters and implants
August 17, 2018 more ...
TAPES3 - Technology Advances for Pilotline of Enhanced Semiconductors for 3 nm
August 17, 2018 more ...
2018 IEEE International Flexible Electronics Technology Conference
August 07 - 09, 2018 more ...
Chip-Film Patch cover story in IEEE journal “Transactions on Components, Packaging, and Manufacturing Technology”
July 23, 2018 more ...
SMT Hybrid Packaging 2018
June 05 - 07, 2018 more ...
Compound Semiconductor Week (CSW)
May 29 - June 01, 2018 more ...
Micro Assembly Day 2018
May 17, 2018 more ...
Emerging Technologies 2018
May 09 - 11, 2018 more ...
IEEE-EDS Distinguished Lecture in Ontario, Canada
May 08, 2018 more ...
Staatssekretärin Katrin Schütz visits the IMS and presents funding notification
April 24, 2018 more ...
Hannover Messe HMI
April 23 - 27, 2018 more ...
Day of Information Logistics 2018
April 19 - March 20, 2018 more ...
GaN Marathon 2.0
April 18 - 19, 2018 more ...
microTEC Südwest Clusterkonferenz 2018
April 16 - 17, 2018 more ...
CS International Conference 2018
April 10 - 11, 2018 more ...
Newsletter issue 1 2018
April 06, 2018 more ...
ICT.OPEN 2018
March 19 - 20, 2018 more ...
NILindustrialday 2018
March 08 - 09, 2018 more ...
Review: innBW research facilities´ performance excellent
December 21, 2017 more ...
KMU-innovativ project GaNScan launched
December 14, 2017 more ...
2017 FLEX Europe Conference – be flexible
November 15 - 16, 2017 more ...
Project launch for the manufacture of large-scale Si energy filter membranes
November 03, 2017 more ...
IEEE SENSORS 2017
October 29 - November 01, 2017 more ...
15th Workshop "Beams and More" 2017
October 24, 2017 more ...
MikroSystemTechnik Kongress 2017 in München
October 23 - 25, 2017 more ...
Microelectronics technology workshop
October 11 - 13, 2017 more ...
2017 IEEE International Symposium on Systems Engineering
October 11 - 13, 2017 more ...
IEEE Electron Devices Society - Mini Colloquium
September 15, 2017 more ...
This year´s ESSDERC Best “Young Scientist” Paper Award goes to the IMS.
September 15, 2017 more ...
European Solid-State Device Research Conference (ESSDERC) in Leuven
September 11 - 14, 2017 more ...
EMPC Konferenz 2017 in Warschau
September 10 - 13, 2017 more ...
Wirtschaftsministerium sponsoring IMS CHIPS with 3 million euros to switch to 8 inch wafer technology
August 22, 2017 more ...
The sixth PRONTO workshop will be held at IMS in Stuttgart
July 04, 2017 more ...
BMBF projekt MULTI-3D launched
June 19, 2017 more ...
Newsletter issue 1 2017
June 09, 2017 more ...
The 61st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
May 30 - June 02, 2017 more ...
SPIE Microtechnologies 2017
May 08 - 10, 2017 more ...
Minister of Commerce, Dr. Nicole Hoffmeister-Kraut, authorizes project about intelligent and energy-efficient sensor systems
April 27, 2017 more ...
Hannover Messe HMI
April 24 - 28, 2017 more ...
InnoTruck – technology and ideas for the future
April 24, 2017 more ...
19th European Conference on Integrated Optics 2017
April 03 - 05, 2017 more ...
Clusterkonferenz des Spitzenclusters MicroTEC Südwest
March 27 - 28, 2017 more ...
BEAMeeting 2017 - Technical Workshop & Discussion
March 27 - 28, 2017 more ...
Staatssekretärin Katrin Schütz visits the IMS and presents funding notification
March 06, 2017 more ...
49th meeting of the “Optical Communication” consortium
March 03, 2017 more ...
Intelligent micro system technology - from theory until application
February 16, 2017 more ...
BMBF project µHTS-CAN launched
February 01, 2017 more ...
Final event for BMBF-sponsored project KoSiF
November 24, 2016 more ...
Newsletter issue 2 2016
November 23, 2016 more ...
14th Workshop "Beams and More" 2016
November 10, 2016 more ...
IMS CHIPS awarded as being one of “100 places to see Industrie 4.0”
November 07, 2016 more ...
SEMICON Europa 2016: Imaging Conference
October 25 - 26, 2016 more ...
IMS CHIPS commemorates 30 years of top technology in Baden-Württemberg
October 17, 2016 more ...
VDC-Workshop CPS 2016
October 13, 2016 more ...
Microelectronics technology workshop
October 12 - 14, 2016 more ...
European Solid-State Device Research Conference (ESSDERC) in Lausanne
September 12 - 15, 2016 more ...
1st Photonics Workshop
June 23, 2016 more ...
International Symposium Organic Electronics: Recent Developments and Challenges (OE 2016)
June 15 - 17, 2016 more ...
SeNaTe - Seven Nanometer Technology project launched
May 21, 2016 more ...
KoSiF at HANOVER Industrial Fair, Hall 2, Stand B22
April 25 - 29, 2016 more ...
NEMEZU project launch - new precious metal-free membrane electrode units for future fuel cells
April 20, 2016 more ...
The fifth PRONTO workshop will be held at NMI in Reutlingen
April 19, 2016 more ...
Newsletter issue 1 2016
April 13, 2016 more ...
Staatssekretär Peter Hofelich visits the IMS and presents funding notification
March 17, 2016 more ...
MicroTEC Südwest: Cluster conference 2016
March 14 - 15, 2016 more ...
The BMBF joint project ETIK for the advancement in EUV lithography has successfully been wrapped up
March 04, 2016 more ...
Intelligent foils for Industrie 4.0
February 24, 2016 more ...
Season´s Greetings
December 11, 2015 more ...
Season´s Greetings
December 11, 2015 more ...
Forum "be-flexible" 2015
November 17 - 18, 2015 more ...
13th Workshop "Beams and More" 2015
November 12, 2015 more ...
Newsletter issue 2 2015
November 06, 2015 more ...
MicroTEC Südwest: final presentations of the Spitzencluster projects
October 26, 2015 more ...
PRONTO production platform on MST congress 2015 in Karlsruhe
October 26 - 28, 2015 more ...
Baden-Württemberg´s researchers, entrepreneurs and politicians visiting China
October 17, 2015 more ...
Microelectronics technology workshop
October 07 - 09, 2015 more ...
IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference
October 05 - 08, 2015 more ...
Intelligent Li ion batteries in production and use
October 01, 2015 more ...
20th European Microelectronics and Packaging Conference (EMPC)
September 14 - 16, 2015 more ...
hema electronic presents new camera system to monitor online welding processes
September 10, 2015 more ...
Color Eye project launched on September 1st
September 01, 2015 more ...
Ministerium für Finanzen und Wirtschaft funds research at Institut für Mikroelektronik Stuttgart
August 18, 2015 more ...
MEMS - DMFC project launch – direct methanol fuel cell based on micro electric mechanical systems
August 12, 2015 more ...
IMS CHIPS Dr. Tarek Zaki awarded the "Preis der Freunde" prize
July 16, 2015 more ...
Research partnership in southwest Germany to develop micro implants - Ministry for Finance and Economy in going to fund the project with 3.65 mio. Euros
July 01, 2015 more ...
"MST Wunderland“ successfully developed within the MicroDidact project
June 18, 2015 more ...
Open House at VDI-Haus Stuttgart 2015
June 13, 2015 more ...
Minister for Finance and Economy, Dr. Nils Schmid, visits the IMS and presents the funding notification
May 22, 2015 more ...
Colloquium “Laser direct writing technology at the IMS”
May 08, 2015 more ...
Newsletter issue 1 2015
March 27, 2015 more ...
Foundation of Allianz Industrie 4.0 BW on March 26th, 2015
March 26, 2015 more ...
ICT.OPEN 2015
March 24 - 25, 2015 more ...
The 4th PRONTO workshop was held this time at HSG-IMAT on March 4th
March 04, 2015 more ...
7th Innovation forum for Mico Technology & SmartSystems 2015 in Donaueschingen
February 25, 2015 more ...
ISSCC International Solid-State Circuits Conference 2015
February 22 - 26, 2015 more ...
Dissertation awarded by the Anton-und-Klara-Röser-Stiftung
February 13, 2015 more ...
New laser direct writer has been launched
January 23, 2015 more ...
Season´s Greetings
December 12, 2014 more ...
12th Workshop "Beams and More" 2014
November 06, 2014 more ...
13th International Conference on Nanoimprint and Nanoprint Technology 2014, Kyoto
October 22 - 25, 2014 more ...
Working group "Economic and Financial Affairs" of the CDU political party visits the IMS
October 14, 2014 more ...
Methane synthesis - energy storage of the future
October 13, 2014 more ...
Microelectronics technology workshop
October 08 - 10, 2014 more ...
Prof. Joachim N. Burghartz is awarded IEEE Electron Devices Society´s J. J. Ebers Award 2014
October 03, 2014 more ...
Newsletter issue 2 2014
October 02, 2014 more ...
PATMOS 2014, Majorca
September 29 - October 01, 2014 more ...
44th European Solid-State Device Research Conference (ESSDERC) in Venice
September 22 - 26, 2014 more ...
EOSAM European Optical Society 2014
September 15, 2014 - September 19, 2015 more ...
PRONTO "Ultimum" project extended
August 18, 2014 more ...
SITARA – Self-adapting intelligent multi aperture camera modules
June 13, 2014 more ...
Workshop "Process control in laser material processing – Concepts, Systems, Applications"
June 05, 2014 more ...
LOPEC 6. internationale Fachmesse und Kongress für gedruckte Elektronik 2014
May 26 - 28, 2014 more ...
MicroTEC Südwest: Cluster conference 2014
May 05 - 06, 2014 more ...
PRONTO production platform is growing
May 05, 2014 more ...
Institut für Mikroelektronik Stuttgart receives 5 mio. Euros in institutional funding from the Baden-Württemberg government
May 02, 2014 more ...
Newsletter issue 1 2014
April 11, 2014 more ...
The "Guide to State-of-the-Art Electron Devices" is awarded the PROSE Award 2013
March 24, 2014 more ...
Collaboration Yields Ever Smaller Chip Features
March 24, 2014 more ...
INSERO3D: 1st generation highly-dynamic stereo camera system
March 22, 2014 more ...
1st project support committee meeting for X-MIND project
March 20, 2014 more ...
2nd Kooperative Innovationsprozesse group session meeting to be held at the Institut für Mikroelektronik Stuttgart
March 11, 2014 more ...
3rd PRONTO workshop to be held at the Institut für Mikroelektronik Stuttgart
January 22, 2014 more ...
The Ministerium für Finanzen und Wirtschaft funds the Institut für Mikroelektronik Stuttgart with 1,342,000 mio. Euros.
December 13, 2013 more ...
16. Workshop der GMM – Fachgruppe 1.2.3 Abscheide- und Ätzverfahren, Erlangen
December 11, 2013 more ...
Season´s Greetings
December 09, 2013 more ...
International award has been awarded to a Ph. D. student from Stuttgart
December 08, 2013 more ...
The ICT.OPEN 2013 Poster Award goes to the IMS
November 28, 2013 more ...
ICT.OPEN 2013
November 27 - 28, 2013 more ...
Forum "be-flexible" 2013 - Thin Semiconductor Devices, 14th International Workshop
November 20 - 21, 2013 more ...
11th Workshop "Beams and More" 2013
November 07, 2013 more ...
Business Medal awarded to Stuttgart´s Horst Fischer of the Institut für Mikroelektronik Stuttgart
November 06, 2013 more ...
Ministerialdirektor Rolf Schumacher visits the IMS and presents funding notification
October 25, 2013 more ...
PRONTO production platform presented at MST Congress 2013 in Aachen
October 14 - 16, 2013 more ...
Microelectronics technology workshop
October 09 - 11, 2013 more ...
Innovationsallianz Baden-Württemberg: Invitation to Bürgerfest
October 02 - 03, 2013 more ...
Newsletter issue 2 2013
September 27, 2013 more ...
ISCDG 2013 – IEEE International Semiconductor Conference Dresden Grenoble in Dresden
September 26 - 27, 2013 more ...
SPIE Photomask Technology 33rd Annual Symposium 2013
September 10 - 12, 2013 more ...
EMPC 2013 – European Microelectronics and Packaging Conference in Grenoble
September 09 - 12, 2013 more ...
SMC - Practical course for students
July 15 - 26, 2013 more ...
Ph. D. student from Stuttgart awarded international prize
July 15, 2013 more ...
World record in photonic integration in silicon
July 01, 2013 more ...
PRIME 2013 – 9th Conference on Ph. D. Research in Microelectronics and Electronics in Villach
June 24 - 27, 2013 more ...
TRANSDUCERS' 2013 – The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
June 16 - 20, 2013 more ...
TEMPERATUR 2013
June 05 - 06, 2013 more ...
IEEE International Conference on Electron Devices and Solid-State Circuits (EDSSC 2013) in Hong Kong
June 03 - 05, 2013 more ...
Newsletter issue 1 2013
May 14, 2013 more ...
Smart Frame R&D Workshop at IMS
May 08, 2013 more ...
MicroTEC Südwest: Cluster conference 2013
April 22 - 23, 2013 more ...
Opening ceremony of the clean room expansion at the Institut für Mikroelektronik Stuttgart
April 22, 2013 more ...
BMBF-sponsored KoSiF project launched - industry and research teaming up on bendable and autonomous sensor systems
March 27, 2013 more ...
Attractive Science - Energie Innovation Exchange at the International Chamber of Commerce (IHK) in Villingen-Schwenningen
March 20, 2013 more ...
IMS Chipfilm™ Technology publication in IEEE Spectrum
March 01, 2013 more ...
5th Innovation forum for Mico Technology & SmartSystems in Villingen-Schwenningen
February 27, 2013 more ...
Lecture "Ultra Thin Chips: A new paradigm in silicon technology?"
February 12 - 14, 2013 more ...
49. MPC Workshop 2013 in Mannheim
February 08, 2013 more ...
CEB Clean Energy Building 2013 in Stuttgart
February 07 - 09, 2013 more ...
53. MPC Workshop 2015 in Esslingen
February 06, 2013 more ...
"ASIC Lifecycle" seminar at the IMS on January 22nd, 2013
January 22, 2013 more ...
Season´s Greetings
December 17, 2012 more ...
The EXEPT project is awarded the CATRENE Innovation Award 2012
December 04, 2012 more ...
µ-Probe project wrapped up successfully: Heatable steering plate fulfills expectations
November 30, 2012 more ...
The HiDRaLoN project has been awarded the Demonstration Award 2012 during this year´s European Nanoelectronics Forum 2012
November 26, 2012 more ...
Newsletter issue 2, 2012
October 30, 2012 more ...
BMBF Project for New Chip Fabrication Technology Successfully Completed
October 29, 2012 more ...
Successful progress of the HiDRaLoN project funded by the German Federal Ministry of Education and Research (BMBF)
October 22, 2012 more ...
10th Workshop "Beams and More" 2012
October 18, 2012 more ...
Microelectronics technology workshop
October 10 - 12, 2012 more ...
The Director General of the Ministry of the Environment, Climate Protection and the Energy Sector, Helmfried Meinel, visited IMS CHIPS and inquired on the latest research developments
October 10, 2012 more ...
Vienna-Tec 2012
October 09 - 12, 2012 more ...
3rd Workshop - Packaging of PackMEMS 2012 Microsystems
October 02, 2012 more ...
2nd PRONTO workshop to be held at the HSG-IMIT in Villingen-Schwenningen
September 26, 2012 more ...
4th Electronics System ESTC 2012, Amsterdam
September 17 - 20, 2012 more ...
42nd European Solid-State Device Research Conference (ESSDERC) in Bordeaux
September 17 - 21, 2012 more ...
"Business-oriented Research Facilities" event series of the International Chamber of Commerce at IMS
September 13, 2012 more ...
BMBF Project ETIK Leads to Enhancement of EUV Lithography
August 30, 2012 more ...
SMC - Practical course for students
July 16 - 27, 2012 more ...
IMS CHIPS at Reutlinger Innovationstage 2012
July 12, 2012 more ...
MedTech Pharma 2012
July 04 - 05, 2012 more ...
Specialized Workshop „Intelligent Light“ at the IMS
June 28, 2012 more ...
METEC awarded with the VR-InnovationsPreis Mittelstand 2012 prize
June 20, 2012 more ...
8th Conference on Ph.D. Research in Microelectronics & Electronics in Aachen
June 12 - 15, 2012 more ...
PRONTO production platform presented at SENSOR+TEST 2012
May 22 - 24, 2012 more ...
MicroTEC Südwest: Cluster conference 2012
May 14 - 15, 2012 more ...
Control 2012 - The International Trade Fair for Quality Assurance
May 08 - 12, 2012 more ...
Retina Implant airs on „Die Sendung mit der Maus“
April 25, 2012 more ...
PRONTO at HANOVER Industrial Fair, Hall 17 Stand C48
April 23 - 27, 2012 more ...
SPIE Photonics Europe 2012
April 16 - 19, 2012 more ...
Newsletter issue 1 2012
April 05, 2012 more ...
24V ASICs hitting the market
March 21, 2012 more ...
7th International Conference on Integrated Power Electronics Systems (CIPS) 2012 in Nuremberg
March 06 - 08, 2012 more ...
4th Innovation forum for Mico Technology in Villingen-Schwenningen
February 29, 2012 more ...
Symposium "Elektronische Baugruppen und Leiterplatten EBL 2012" in Fellbach
February 14 - 15, 2012 more ...
Topping-out ceremony at IMS CHIPS: Extension of Cleanroom Building
February 13, 2012 more ...
Baden-Württemberg´s State Secretary Ingo Rust visits the IMS
January 31, 2012 more ...
The 25th International Conference on Micro Electro Mechanical Systems IEEE MEMS 2012 - Paris, France
January 29 - February 02, 2012 more ...
"Microsystems: Science meets education"
January 27 - February 10, 2012 more ...
The Micronarc Alpine Meeting MAM 2012 - Villars-sur Ollon, Switzerland
January 24, 2012 more ...
Season´s Greetings
December 17, 2011 more ...
Recognition for METEC during the award of the Innovation Prize of Baden-Württemberg
November 24, 2011 more ...
Forum "be-flexible" 2011 - Flexible Electronic Systems, 10th International Workshop
November 23, 2011 more ...
The ICT.OPEN 2011 BEST POSTER AWARD goes to the IMS
November 15, 2011 more ...
ICT.OPEN 2011
November 14 - 15, 2011 more ...
HiDRaLoN 4. User Group Workshop
November 11, 2011 more ...
9th Workshop "Beams and More" 2011
October 27, 2011 more ...
Microelectronics technology workshop
October 12 - 14, 2011 more ...
GMM-Prize 2011 awarded to Evangelos Angelopoulos, IMS CHIPS, on October 12, 2011
October 12, 2011 more ...
PRONTO production platform presented at MST Congress 2011 in Darmstadt
October 10 - 12, 2011 more ...
Newsletter issue 2 2011
September 30, 2011 more ...
Semiconductor Conference Dresden (SCD)
September 27 - 28, 2011 more ...
SPIE Photomask Technology 31st Annual Symposium 2011
September 19 - 22, 2011 more ...
41st European Solid-State Device Research Conference (ESSDERC) in Helsinki
September 12 - 16, 2011 more ...
IMS CHIPS Member of “eBeam Initiative”
September 12, 2011 more ...
SMC - Practical course for students
July 18 - 29, 2011 more ...
Day of the Innovation Alliance InnBW
July 14, 2011 more ...
46. Heidelberger Bildverarbeitungsforum 2011, Kelheim near Regensburg
July 05, 2011 more ...
Cluster Conference of the Spitzencluster MicroTEC Südwest
July 05 - 06, 2011 more ...
First PRONTO workshop to be held at the Institut für Mikroelektronik Stuttgart
June 30, 2011 more ...
Scientific Association of the Institut für Mikroelektronik Stuttgart e.V.
June 30, 2011 more ...
PRONTO production platform presented at SENSOR+TEST 2011
June 07 - 09, 2011 more ...
TRANSDUCERS' 11 – The 16th International Conference on Solid-State Sensors, Actuators and Microsystems
June 05 - 09, 2011 more ...
TAE Business Breakfast – Competitive microsystem technology needs young talents
May 26, 2011 more ...
"Microsystems: Science meets education"
May 23 - 31, 2011 more ...
PRONTO production platform presented at SMT/HYBRID/PACKAGING 2011
May 03 - 05, 2011 more ...
The HyperBraille display for the vision impaired opens new frontiers in education and business
April 28 - 30, 2011 more ...
PRONTO at HANOVER Industrial Fair, Hall 6, Stand H18-E4
April 04 - 08, 2011 more ...
German Microwave Conference 2011 in Darmstadt
March 14 - 16, 2011 more ...
IMS CHIPS Standardizes on Cadence Silicon Realization Product Line for Advanced Gate Array Design
February 23, 2011 more ...
ISSCC International Solid-State Circuits Conference 2011
February 20 - 24, 2011 more ...
Ground breaking ceremony at IMS CHIPS : Extension of Cleanroom Building
February 15, 2011 more ...
Nano Patterning Facility for Low/Mid Volume Production
February 14, 2011 more ...
45. MPC Workshop 2011 in Albstadt-Sigmaringen
February 04, 2011 more ...
Season´s Greetings
December 17, 2010 more ...
New release Ultra-thin Chip Technology and Applications technical book
December 13, 2010 more ...
"Microsystems: Science meets education"
December 07, 2010 more ...
New Ultrathin Chip Fabrication Process Presented at IEDM 2010 in San Francisco
December 06 - 08, 2010 more ...
Sensational medical success with IMS Retina Chip
December 02, 2010 more ...
HiDRaLoN User Group Workshop
November 12, 2010 more ...
Microsystem technology made in Baden-Württemberg: a story of success – also in the future!
October 15, 2010 more ...
Microelectronics technology workshop
October 13 - 15, 2010 more ...
"Embedded Systems & Smart Power" workshop
October 12, 2010 more ...
PRONTO production platform at 4th Microsys fair in Stuttgart
September 13 - 16, 2010 more ...
ESTC 2010, Berlin: Lecture "Packaging Challenges Associated with Warpage of Ultra-Thin Chips"
September 13 - 16, 2010 more ...
Newsletter issue 2 2010
September 10, 2010 more ...
Professional association of microelectronics IVAM joined
September 06, 2010 more ...
SMC - Practical course for students
July 19 - 30, 2010 more ...
8th Workshop "Beams and More" 2010
July 10, 2010 more ...
The Landesforschungspreis für Angewandte Forschung goes to Professor Dr.-Ing. Joachim Burghartz in an award ceremony held in Stuttgart
July 08, 2010 more ...
Chipfilm™ project completed successfull
June 29, 2010 more ...
TanDEM-X - radar satellite liftoff from Baikkonur successful
June 21, 2010 more ...
Science meets education: “Microchips”
June 21, 2010 more ...
MoDekt – Final presentation on June 7, 2010 in Tuebingen
June 07, 2010 more ...
IEEE EDS Mini-Kolloquium on June 7th, 2010
June 07, 2010 more ...
54th International Conference on Electron, Ion, and Photon Beam Technology & Nanofabrication
June 01 - 04, 2010 more ...
2. GMM Workshop — Technologien und Werkstoffe der Mikrosystem- und Nanotechnik
May 10 - 11, 2010 more ...
New Braille display equipped with IMS ASICs at the SightCity 2010 in Frankfurt
April 28 - 30, 2010 more ...
Professor Dr.-Ing. Joachim Burghartz of the Institut für Mikroelektronik Stuttgart is awarded the Landesforschungspreis für Angewandte Forschung
April 23, 2010 more ...
Photomask and NGL Mask Technology XVII
April 13 - 15, 2010 more ...
MEDEA+ Project FANTASTIC completed successfully!
April 11, 2010 more ...
Newsletter issue 1 2010
March 26, 2010 more ...
Joint project ValMon launched
February 09, 2010 more ...
XLIII. MPC Workshop 2010 in Göppingen
February 05, 2010 more ...
IMS CHIPS is awarded Spitzencluster MicroTEC Südwest
January 26, 2010 more ...
Season´s Greetings
December 17, 2009 more ...
Innovative learning media at IMS CHIPS
December 09, 2009 more ...
Press release BMBF-Verbundprojekt HiDRaLoN
December 08, 2009 more ...
Lecture "Anomalous Stress Effects in Ultra-Thin Silicon Chips on Foil"
December 07 - 09, 2009 more ...
Again Paper Award at the SPIE Photomask Conference 2009 in Monterey, USA
December 07, 2009 more ...
Science meets education: “Microchips”
November 30, 2009 more ...
SAFE 2009 – Annual Workshop on Semiconductor Advances for Future Electronics and SENSORS
November 26 - 28, 2009 more ...
8th International Conference on Nanoimprint and Nanoprint Technology
November 11 - 13, 2009 more ...
First User Group Workshop within the scope of the HiDRaLoN project
November 06, 2009 more ...
EDS Chapter Meeting on November 4th, 2009, in Reutlingen
November 04, 2009 more ...
7th Workshop "Beams and More" 2009
October 22, 2009 more ...
Microelectronics technology workshop
October 14 - 16, 2009 more ...
Bipolar/BiCMOS Circuits and Technology Meeting (BCTM)
October 13 - 14, 2009 more ...
IMS welcomes gifted youngsters
October 09, 2009 more ...
Micro Nano Engeneering – MNE 2009
September 28 - October 01, 2009 more ...
Newsletter issue 2 2009
September 25, 2009 more ...
ESSDERC/ESSCIRC 2009, Athens: Lecture "Ultra-thin Chips - a New Paradigm in Silicon Technology"
September 14 - 18, 2009 more ...
SPIE Photomask Technology 29th Annual Symposium (BACUS 2009)
September 14 - 17, 2009 more ...
New technology development - medium-sized businesses gain access to Smart Power Chips
August 26, 2009 more ...
EXEPT – 22 nm node EUV lithography
July 22, 2009 more ...
SMC - Practical course for students
July 20 - 31, 2009 more ...
Encore in federal cluster of excellence competition: MicroTEC Südwest in the final round again!
June 25, 2009 more ...
TEMPERATUR 2009
June 24 - 25, 2009 more ...
53rd International Conference on Electron, Ion, and Photon Beam Technology & Nanofabrication
May 26 - 29, 2009 more ...
Project HiDRaLoN launched
May 24, 2009 more ...
16th Symposium of the VDE/VDI “Mikrotechnik" workshop in Thüringen
May 19, 2009 more ...
International Conference on IC Design & Technology
May 18 - 20, 2009 more ...
New Braille display equipped with IMS ASICs at the SightCity 2009 in Frankfurt
May 13 - 15, 2009 more ...
"Science and Technology" – classes at the IMS
April 21, 2009 more ...
Hannover Fair, Hall 2 - Booth C21
April 20 - 24, 2009 more ...
Photomask and NGL Mak Technology XVI
April 08 - 10, 2009 more ...
Newsletter issue 1 2009
March 27, 2009 more ...
SPIE Advanced Lithography 2009
February 22 - 27, 2009 more ...
IMS CHIPS research group receives ISSCC Jack Raper Award
February 09, 2009 more ...
XLI. MPC Workshop 2009 in Künzelsau
February 06, 2009 more ...
New Collaboration in the Nanoimprint Lithography Industry
January 27, 2009 more ...
Season´s Greetings
December 17, 2008 more ...
Lecture "CMOS Imager Technologies for Biomedical Applications"
December 16, 2008 more ...
Lecture "Ultra-thin Chips - a New Paradigm in Silicon Technology"
December 10 - 11, 2008 more ...
Forum "be-flexible" 2008 - Thin Semiconductor Devices, 9th International Workshop
December 02, 2008 more ...
SAFE 2008 – Annual Workshop on Semiconductor Advances for Future Electronics and SENSORS
November 27 - 28, 2008 more ...
Microelectronics technology workshop
November 14 - 29, 2008 more ...
5. GMM-Workshop - Energieautarke Sensorik
November 12 - 13, 2008 more ...
The IMS exhibits at VISION 2008 fair in Stuttgart
November 04 - 06, 2008 more ...
4th Global Plastic Electronics Conference and Showcase
October 27 - 29, 2008 more ...
IMS CHIPS and Robert Bosch signed contract
October 24, 2008 more ...
6th Workshop "Masks and More" 2008
October 23, 2008 more ...
HDRC® -Imager Workshop 2008
October 16, 2008 more ...
Poster Award at the SPIE Photomask Conference 2008 in Monterey, USA
October 10, 2008 more ...
SPIE Photomask Technology 28th Annual Symposium (BACUS 2008)
October 06 - 10, 2008 more ...
Newsletter issue 2 2008
September 26, 2008 more ...
U.R.S.I. Kleinheubacher Tagung 2008
September 22 - 25, 2008 more ...
IMS CHIPS at Motek 2008
September 22 - 25, 2008 more ...
IISB Lithography Simulation Workshop
September 18 - 20, 2008 more ...
Sponsoring of the IMS hands-on course for students
August 04, 2008 more ...
SMC - Practical course for students
July 14 - 25, 2008 more ...
25 Years Institut für Mikroelektronik Stuttgart
July 09, 2008 more ...
ASIC workshop 2008
May 27, 2008 more ...
Hannover Fair, Hall 2 - Booth C21
April 21 - 25, 2008 more ...
SPIE Photonics Europe 2008
April 07, 2008 more ...
EU project MAGIC launched
March 28, 2008 more ...
Newsletter issue 1 2008
March 27, 2008 more ...
Image Sensors Europe, Conference
March 19 - 20, 2008 more ...
MicroTEC Südwest in the finals
March 11, 2008 more ...
hema presenting the HDRC® image sensor "seelector ICAM"
March 04, 2008 more ...
IMS CHIPS at SPIE Advanced Lithography 2008
February 24 - 29, 2008 more ...
New GFQ master
February 05, 2008 more ...
ISSCC International Solid-State Circuits Conference 2008
February 03 - 07, 2008 more ...
Closing Event: "Idea to Product"
January 14, 2008 more ...
Season´s Greetings
December 16, 2007 more ...
Germany's Federal Criminal Police Office (BKA) publishes the final report "Authentizität digitaler Bilder II" ("Authenticity of Digital Images - Part II") by IMS
December 10, 2007 more ...
ABBILD - BMBF project wrapped up successfully!
November 30, 2007 more ...
The IMS exhibits at Innovation Fair & Congress 07
November 29, 2007 more ...
Article in Photonik magazine on the application "Thin-Film-on-CMOS
November 15, 2007 more ...
The IMS exhibits at VISION 2007 fair in Stuttgart
November 06 - 08, 2007 more ...
5th Workshop "Masks and More" 2007
October 26, 2007 more ...
SPIE Photomask Technology 27th Annual Symposium (BACUS 2007)
September 17 - 21, 2007 more ...
Chipfilm joint project launched
August 28, 2007 more ...
SMC - Practical course for students
July 16 - March 27, 2007 more ...
New HyperBraille user interface for the blind and the vision impaired
July 09, 2007 more ...
Successful launch for TerraSAR-X – Microchips from Stuttgart on Board
June 15, 2007 more ...
Nanoimprint Lithography - Project FANTASTIC
June 14, 2007 more ...
IMS CHIPS exhibits at MiNaT 2007
June 12 - 14, 2007 more ...
Conference programme 13th SENSOR Conference
May 22, 2007 more ...
6th Annual Mechatronics Day in Göppingen
May 09, 2007 more ...
Photomask Japan 2007
April 17 - 20, 2007 more ...
Hannover Fair, Hall 2 - Booth C19
April 16 - 20, 2007 more ...
Advanced Night Vison Systems - NIRWARN
April 05, 2007 more ...
We present our IMS newsletter
April 02, 2007 more ...
Welcome back after our Relaunch!
March 14, 2007 more ...
33. Bildverarbeitungsforum in Mannheim
March 06, 2007 more ...
Website relaunch
March 04, 2007 more ...
VIP Innovations-Workshop
March 01, 2007 more ...
Article in Spiegel magazine on HDR photography
March 01, 2007 more ...
Retina Implant
February 22, 2007 more ...
SafetyEYE® - a safe look with HDRC® image sensors
February 22, 2007 more ...
Intensive Course Microelectronic Technology
February 19 - 22, 2007 more ...
New ultra-thin chip fabrication process
December 12, 2006 more ...
International Electron Devices Meeting
December 11, 2006 more ...
Best Paper Award at Photomask Japan 2006
November 21, 2006 more ...
Brilliant recording with high-dynamic digital camera, optimized signal processing and rendering with a new type of display.
November 21, 2006 more ...
Workshop on ''Microhandling''
October 31, 2006 more ...
Lithography Workshop 2006
October 26, 2006 more ...
IMS at the fair VISION 2006 in Stuttgart
October 23 - November 09, 2006 more ...
Intensive Course Microelectronic Technology
July 31 - August 04, 2006 more ...
Microchips - a Hands-on Course for Students
July 24 - August 04, 2006 more ...
''Sensor technology - the way to the future''
May 22, 2006 more ...
Workshop ''New Applications in Silicon Technology''
May 17, 2006 more ...
MORE than Moore – New Applications in Silicon Technology
May 08, 2006 more ...
Exhibition at the Solar Information Center in Freiburg/Brsg., Germany, by members of the Baden-Wuerttemberg Association for Mircrosystem Technology (MST BW)
May 04, 2006 more ...
Hannover Fair, Hall 2 - Booth C19
April 24 - 28, 2006 more ...
Lecture on Semiconductor Technology 2
April 05, 2006 more ...
European project IVP successfully completed
March 06, 2006 more ...
Intensive Course Microelectronic Technology
February 20 - 24, 2006 more ...
Prof. Dr. J. Burghartz has been appointed new director at IMS
October 01, 2005 more ...
The first eight EUV fullfield masks have been manfactured for ASML
August 10, 2005 more ...
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