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SPIE Advanced Lithography 2021
February 22 - 27, 2021
The IMS is represented with a lecture at the SPIE Advanced Lithography 2021 in San Jose, USA.
Session 6: Novel Resist Concepts and Track Processes
„Multidimensional process optimization of a negative e-beam photoresist for silicon-waveguide manufacturing“
Markus Greul, Holger Sailer, Mathias Kaschel, Joachim N. Burghartz
The presentation will be available for viewing the entire week of 22 - 26 February 2021.
For further information on the MOS-AK workshop, please go the following website: https://spie.org/conferences-and-exhibitions/advanced-lithography?SSO=1
Location: San Jose, California, United States, Digital Forum, Online Only
Deutscher Zukunftspreis 2020 for EUV technology
November 24, 2020
The Baden-Württemberg Minister of Economic Affairs congratulates companies on award
Minister of Economic Affairs, Dr. Nicole Hoffmeister-Kraut, has congratulated the Zeiss company in Oberkochen and the Ditzingen-based Trumpf company on being awarded the Deutscher Zukunftspreis 2020 by the German president.
"With their outstanding research work, Zeiss and Trumpf, together with the Dutch company ASML and many other partners, have succeeded in making decisive progress in the production of modern microchips. They have thus overcome an important hurdle on the way to faster processing of large amounts of data in artificial intelligence applications. Being awarded the Zukunftspreis is proof of the outstanding innovative strength of Baden-Württemberg's industry and business-related research facilities," said the Minister today (November 26th). The Zeiss company works in a close partnership with the Institut für Mikroelektronik Stuttgart (IMS CHIPS).
In contrast to conventional optical lithography, the EUV imaging system from ZEISS is not based on lenses but on mirrors. These high-precision mirrors from Oberkochen can have a diameter of up to one meter and require curvature accuracies in a nanometer range. In order to be able to measure these mirrors, individually manufactured high-precision Computer Generated Holograms (CGHs) are required, which are produced at Institut für Mikroelektronik Stuttgart (IMS CHIPS) using a unique technology. With their state-of-the-art equipment, such as electron beam writers and dedicated experts, it is possible at IMS CHIPS to also provide very large quartz substrates with structure sizes in the range below 100 nanometers. This in turn enables ZEISS to measure mirrors of the most diverse geometries with the required precision. IMS CHIPS, a member of the Innovationsallianz Baden-Württemberg (innBW), is one of ZEISS' key partners.
Press release of the Minister of Economic Affairs, Dr. Nicole Hoffmeister-Kraut on the German Future Prize
Further reference:
Deutscher Zukunftspreis
Press Release Bundesforschungsministeriums
Press Release Trumpf
Press Release ZEISS
Webinar IMS CHIPS 2020
November 19, 2020
On 19 November 2020 IMS CHIPS organized a free Webinar with IMS experts.
Due to the worldwide Covid 19 situation, the 18th Beams & More workshop, which was scheduled for November 19, could not take place.
The presentations cover highlights like results from our new laser writer, the extension of our photonic activities or current process developments at IMS CHIPS.
Lectures:
- HIMT ULTRA - a new state-of-the-art Laser Writer at IMS CHIPS – Holger Sailer
- Datafiles and -formats for Lithography at IMS CHIPS – Stephan Martens
- Silicon Photonics: Integrated photonics for sensing applications – Mathias Kaschel
- HySiF – Hybrid Systems in Foil – Björn Albrecht
- Silicon energy filters for single step implantations of SiC substrates – Tamas Steinbach
- Si (111) deep etching for GaN applications – Matthias Moser
- Closing remarks/Outlook 2021 – Julian Hartbaum
Newsletter issue 2 2020
November 06, 2020
We present our IMS newsletter.
In this newsletter (issue 2, 2020) we would like to give you some highlights of our ongoing activities at the Institut fuer Mikroelektronik Stuttgart. The topics of the current issue are:
POSITION II – pilot line for the next generation of intelligent catheters and implants
New innovation and the introduction of open technology platforms provide the foundation for the next generation of catheter and implants. Miniaturization, signal acquisition as close as possible to the object, wireless communication and adapted encapsulation play a central role.
ZIM project Fiber Coupling
Within the ZIM joined project, a fast and precise assembly technique to connect optical fibers to optical chips is being developed. For this purpose,
guide structures for the glass fiber absorption on the silicon are manufactured using a laser and etching process.
Modernization of wet chemistry and upgrade to 200 mm line
At IMS CHIPS a gradual replacement of the wet chemical equipment has been taking place since 2019. The new line includes state-of-the-art machines with increased cleaning efficiency and improved quality control. The newly purchased equipment enables the fully automatic processing of wafers with diameters of up to 200 mm with higher throughput, optimized reproducibility and a safe execution of wet etching and cleaning processes.
HDRC®-AeroPantoCam – a sensor system for visual and thermal monitoring of railed vehicle pantographs
A torn overhead line causes train cancellations and delays. Within the ZIM joint project HDRC®-AeroPantoCam IMS CHIPS and the project partners KST and Gevitec are developing a novel and extremely robust sensor system for visual and thermal monitoring of the pantographs of rail vehicles in outdoor areas.
Our current IMS Newsletter can be found under Publications - Current publications.
Nature magazine article: CMOS chip from IMS CHIPS as hologram projector
September 10, 2020
Scientists at Max Planck Institute for Intelligent Systems and the University of Stuttgart developed an ultrasonic projector for high-resolution moving holographic images. The researchers now report on this in an article in the renowned Nature magazine.
The ultrasound projector is based on a special microchip that was developed and manufactured at Institut für Mikroelektronik Stuttgart. The chip has thousands of tiny gold-plated electrodes, which are arranged as a matrix on the chip surface and can be digitally controlled via electronics integrated in the chip. This way, microbubbles can be generated precisely in liquid above the electrodes, which in turn can be used to spatially modulate ultrasonic waves, resulting in a holographic image impression. Since the so-called "microbubbles" can be switched on and off digitally in rapid succession via the chip, holographic videos can be reproduced with a spatial image impression
The original publication can be found on www.nature.com
For further information, please go:
University of Stuttgart
Max Planck Institute for Intelligent Systems
Microsystems for AI - AI for Microsystems: from neuromorphic hardware and intelligent sensor technology
December 03, 2020
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8th Electronics System-Integration Technology Conference ESTC 2020, Vestfold, Norway
September 15 - 18, 2020
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IEEE International Conference on Flexible and Printable Sensors and Systems 2020, Manchester, UK
August 16 - 19, 2020
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Sensor technology of the future - hardware/software innovations and artificial intelligence
June 29, 2020
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PanaMEA – intelligent blood sugar level monitoring
June 29, 2020
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Innovationsallianz Baden-Württemberg receives office in Stuttgart and founds association
June 24, 2020
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Newsletter issue 1 2020
May 15, 2020
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"100 places for industry 4.0 live experience" at IMS CHIPS is postponed
April 01, 2020
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microTEC Südwest cluster conference postponed to September 21-22, 2020
March 18 - 19, 2020
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Joint Spring MOS-AK Workshop and IEEE EDS Mini-Colloquium on „Non-conventional Devices and Technologies“ cancelled
March 17 - 18, 2020
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Future cluster “QSens” - Quantum sensors for the future
March 16, 2020
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Hardware AI: Use cases and requirements from the perspective of medium-sized businesses
February 18, 2020
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INOSENS - Research on an innovative optical rotation angle sensor
January 23, 2020
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Season´s Greetings
December 14, 2019
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17th expert group meeting Micro Medical Technology: minimal invasive diagnostics
December 03, 2019
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Kretschmann on a delegation trip to Paris
November 20, 2019
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Ministry of Economics supports Institute for Microelectronics Stuttgart
November 20, 2019
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Commemoration of “5 years of Allianz Industrie 4.0 Baden-Württemberg”
November 18, 2019
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17th Workshop "Beams and More" 2019
November 14, 2019
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MikroSystemTechnik Congress 2019 in Berlin
October 28 - 30, 2019
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The 18th IEEE Conference on Sensors 2019
October 27 - 30, 2019
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45th meeting of the user group Hot Processes and RTP and 61st meeting of the user group Ion implantation
October 23 - 24, 2019
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Newsletter issue 2 2019
October 16, 2019
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Microelectronics technology workshop
October 09 - 11, 2019
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45th International Conference on Micro & Nano Engineering 2019
September 23 - 26, 2019
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Workshop Chip Design Management for Users and Customers
July 08, 2019
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13th International Conference on Nitride Semiconductors (ICNS-13)
July 07 - 12, 2019
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State Technology Festival 2019 at the VDI House in Stuttgart
June 29, 2019
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Ministry of Economics funds joint project "Microelectronics for Artificial Intelligence" with around two million euros
June 28, 2019
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Transducers 2019 - EUROSENSORS XXXIII
June 23 - 27, 2019
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VDC TZ Meetup on Digtal Change
May 23, 2019
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IMS CHIPS received the Dürr Supplier Award 2019
May 16, 2019
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Particle sensor - developing a highly-integrated portable system for real-time analysis of the ambient air
April 24, 2019
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IDTechEx Show! 2019
April 10 - 11, 2019
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NILindustrialday 2018
March 28 - 29, 2019
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Economy meets science - step by step towards digitised production
March 27, 2019
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CS International Conference 2019
March 26 - 27, 2019
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Newsletter issue 1 2019
March 22, 2019
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“Mikroelektronik für Industrie 4.0” conference
March 21 - 22, 2019
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microTEC Südwest Clusterkonferenz 2019
March 20 - 21, 2019
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11. Innovation Forum Smarte Technologien & Systeme
March 14, 2019
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Forschungsseminar/EDS Webinar
March 13, 2019
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MOCVD 4.2 project launch
January 01, 2019
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HDRC-AeroPantoCam - sensor system for visual and thermal monitoring of railed vehicle pantographs
December 13, 2018
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EVG Bio & Photonics Device Manufacturing Workshop 2018
December 10, 2018
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Baden-Württemberg´s Ministry of Economics supporting upgrade measurements with 1.3 million euros at Institut für Mikroelektronik
November 30, 2018
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16th Workshop "Beams and More" 2018
November 15, 2018
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International Workshop on Nitride Semiconductors 2018 (IWN)
November 11, 2018
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The “Fiber Coupling” ZIM project was launched November 1st, 2018
November 01, 2018
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Microelectronics technology workshop
October 10 - 12, 2018
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FLEXMAX project - flexible active sensor matrix for medical applications
October 05, 2018
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The BMBF sponsored project “OPALID” was launched October 1st, 2018
October 01, 2018
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U.R.S.I. Kleinheubacher Tagung 2018
September 24 - 26, 2018
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EDS Newsletter Technical Article Series “Marvels of Microelectronic Engineering”
September 21, 2018
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32nd EUROSENSORS Conference 2018
September 09, 2018 - September 12, 2019
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ESSDERC 2018 - 48th European Solid-State Device Research Conference in Dresden
September 03 - 06, 2018
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POSITION-II - A pilot line for the next generation of smart catheters and implants
August 17, 2018
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TAPES3 - Technology Advances for Pilotline of Enhanced Semiconductors for 3 nm
August 17, 2018
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2018 IEEE International Flexible Electronics Technology Conference
August 07 - 09, 2018
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Chip-Film Patch cover story in IEEE journal “Transactions on Components, Packaging, and Manufacturing Technology”
July 23, 2018
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SMT Hybrid Packaging 2018
June 05 - 07, 2018
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Compound Semiconductor Week (CSW)
May 29 - June 01, 2018
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Micro Assembly Day 2018
May 17, 2018
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Emerging Technologies 2018
May 09 - 11, 2018
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IEEE-EDS Distinguished Lecture in Ontario, Canada
May 08, 2018
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Staatssekretärin Katrin Schütz visits the IMS and presents funding notification
April 24, 2018
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Hannover Messe HMI
April 23 - 27, 2018
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Day of Information Logistics 2018
April 19 - March 20, 2018
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GaN Marathon 2.0
April 18 - 19, 2018
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microTEC Südwest Clusterkonferenz 2018
April 16 - 17, 2018
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CS International Conference 2018
April 10 - 11, 2018
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Newsletter issue 1 2018
April 06, 2018
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ICT.OPEN 2018
March 19 - 20, 2018
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NILindustrialday 2018
March 08 - 09, 2018
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Review: innBW research facilities´ performance excellent
December 21, 2017
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KMU-innovativ project GaNScan launched
December 14, 2017
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2017 FLEX Europe Conference – be flexible
November 15 - 16, 2017
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Project launch for the manufacture of large-scale Si energy filter membranes
November 03, 2017
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IEEE SENSORS 2017
October 29 - November 01, 2017
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15th Workshop "Beams and More" 2017
October 24, 2017
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MikroSystemTechnik Kongress 2017 in München
October 23 - 25, 2017
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Microelectronics technology workshop
October 11 - 13, 2017
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2017 IEEE International Symposium on Systems Engineering
October 11 - 13, 2017
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IEEE Electron Devices Society - Mini Colloquium
September 15, 2017
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This year´s ESSDERC Best “Young Scientist” Paper Award goes to the IMS.
September 15, 2017
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European Solid-State Device Research Conference (ESSDERC) in Leuven
September 11 - 14, 2017
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EMPC Konferenz 2017 in Warschau
September 10 - 13, 2017
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Wirtschaftsministerium sponsoring IMS CHIPS with 3 million euros to switch to 8 inch wafer technology
August 22, 2017
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The sixth PRONTO workshop will be held at IMS in Stuttgart
July 04, 2017
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BMBF projekt MULTI-3D launched
June 19, 2017
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Newsletter issue 1 2017
June 09, 2017
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The 61st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
May 30 - June 02, 2017
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SPIE Microtechnologies 2017
May 08 - 10, 2017
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Minister of Commerce, Dr. Nicole Hoffmeister-Kraut, authorizes project about intelligent and energy-efficient sensor systems
April 27, 2017
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Hannover Messe HMI
April 24 - 28, 2017
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InnoTruck – technology and ideas for the future
April 24, 2017
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19th European Conference on Integrated Optics 2017
April 03 - 05, 2017
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Clusterkonferenz des Spitzenclusters MicroTEC Südwest
March 27 - 28, 2017
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BEAMeeting 2017 - Technical Workshop & Discussion
March 27 - 28, 2017
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Staatssekretärin Katrin Schütz visits the IMS and presents funding notification
March 06, 2017
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49th meeting of the “Optical Communication” consortium
March 03, 2017
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Intelligent micro system technology - from theory until application
February 16, 2017
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BMBF project µHTS-CAN launched
February 01, 2017
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Final event for BMBF-sponsored project KoSiF
November 24, 2016
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Newsletter issue 2 2016
November 23, 2016
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14th Workshop "Beams and More" 2016
November 10, 2016
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IMS CHIPS awarded as being one of “100 places to see Industrie 4.0”
November 07, 2016
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SEMICON Europa 2016: Imaging Conference
October 25 - 26, 2016
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IMS CHIPS commemorates 30 years of top technology in Baden-Württemberg
October 17, 2016
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VDC-Workshop CPS 2016
October 13, 2016
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Microelectronics technology workshop
October 12 - 14, 2016
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European Solid-State Device Research Conference (ESSDERC) in Lausanne
September 12 - 15, 2016
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1st Photonics Workshop
June 23, 2016
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International Symposium Organic Electronics: Recent Developments and Challenges (OE 2016)
June 15 - 17, 2016
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SeNaTe - Seven Nanometer Technology project launched
May 21, 2016
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KoSiF at HANOVER Industrial Fair, Hall 2, Stand B22
April 25 - 29, 2016
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NEMEZU project launch - new precious metal-free membrane electrode units for future fuel cells
April 20, 2016
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The fifth PRONTO workshop will be held at NMI in Reutlingen
April 19, 2016
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Newsletter issue 1 2016
April 13, 2016
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Staatssekretär Peter Hofelich visits the IMS and presents funding notification
March 17, 2016
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MicroTEC Südwest: Cluster conference 2016
March 14 - 15, 2016
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The BMBF joint project ETIK for the advancement in EUV lithography has successfully been wrapped up
March 04, 2016
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Intelligent foils for Industrie 4.0
February 24, 2016
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Season´s Greetings
December 11, 2015
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Season´s Greetings
December 11, 2015
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Forum "be-flexible" 2015
November 17 - 18, 2015
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13th Workshop "Beams and More" 2015
November 12, 2015
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Newsletter issue 2 2015
November 06, 2015
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MicroTEC Südwest: final presentations of the Spitzencluster projects
October 26, 2015
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PRONTO production platform on MST congress 2015 in Karlsruhe
October 26 - 28, 2015
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Baden-Württemberg´s researchers, entrepreneurs and politicians visiting China
October 17, 2015
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Microelectronics technology workshop
October 07 - 09, 2015
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IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference
October 05 - 08, 2015
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Intelligent Li ion batteries in production and use
October 01, 2015
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20th European Microelectronics and Packaging Conference (EMPC)
September 14 - 16, 2015
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hema electronic presents new camera system to monitor online welding processes
September 10, 2015
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Color Eye project launched on September 1st
September 01, 2015
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Ministerium für Finanzen und Wirtschaft funds research at Institut für Mikroelektronik Stuttgart
August 18, 2015
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MEMS - DMFC project launch – direct methanol fuel cell based on micro electric mechanical systems
August 12, 2015
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IMS CHIPS Dr. Tarek Zaki awarded the "Preis der Freunde" prize
July 16, 2015
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Research partnership in southwest Germany to develop micro implants - Ministry for Finance and Economy in going to fund the project with 3.65 mio. Euros
July 01, 2015
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"MST Wunderland“ successfully developed within the MicroDidact project
June 18, 2015
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Open House at VDI-Haus Stuttgart 2015
June 13, 2015
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Minister for Finance and Economy, Dr. Nils Schmid, visits the IMS and presents the funding notification
May 22, 2015
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Colloquium “Laser direct writing technology at the IMS”
May 08, 2015
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Newsletter issue 1 2015
March 27, 2015
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Foundation of Allianz Industrie 4.0 BW on March 26th, 2015
March 26, 2015
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ICT.OPEN 2015
March 24 - 25, 2015
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The 4th PRONTO workshop was held this time at HSG-IMAT on March 4th
March 04, 2015
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7th Innovation forum for Mico Technology & SmartSystems 2015 in Donaueschingen
February 25, 2015
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ISSCC International Solid-State Circuits Conference 2015
February 22 - 26, 2015
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Dissertation awarded by the Anton-und-Klara-Röser-Stiftung
February 13, 2015
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New laser direct writer has been launched
January 23, 2015
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Season´s Greetings
December 12, 2014
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12th Workshop "Beams and More" 2014
November 06, 2014
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13th International Conference on Nanoimprint and Nanoprint Technology 2014, Kyoto
October 22 - 25, 2014
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Working group "Economic and Financial Affairs" of the CDU political party visits the IMS
October 14, 2014
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Methane synthesis - energy storage of the future
October 13, 2014
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Microelectronics technology workshop
October 08 - 10, 2014
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Prof. Joachim N. Burghartz is awarded IEEE Electron Devices Society´s J. J. Ebers Award 2014
October 03, 2014
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Newsletter issue 2 2014
October 02, 2014
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PATMOS 2014, Majorca
September 29 - October 01, 2014
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44th European Solid-State Device Research Conference (ESSDERC) in Venice
September 22 - 26, 2014
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EOSAM European Optical Society 2014
September 15, 2014 - September 19, 2015
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PRONTO "Ultimum" project extended
August 18, 2014
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SITARA – Self-adapting intelligent multi aperture camera modules
June 13, 2014
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Workshop "Process control in laser material processing – Concepts, Systems, Applications"
June 05, 2014
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LOPEC 6. internationale Fachmesse und Kongress für gedruckte Elektronik 2014
May 26 - 28, 2014
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MicroTEC Südwest: Cluster conference 2014
May 05 - 06, 2014
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PRONTO production platform is growing
May 05, 2014
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Institut für Mikroelektronik Stuttgart receives 5 mio. Euros in institutional funding from the Baden-Württemberg government
May 02, 2014
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Newsletter issue 1 2014
April 11, 2014
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The "Guide to State-of-the-Art Electron Devices" is awarded the PROSE Award 2013
March 24, 2014
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Collaboration Yields Ever Smaller Chip Features
March 24, 2014
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INSERO3D: 1st generation highly-dynamic stereo camera system
March 22, 2014
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1st project support committee meeting for X-MIND project
March 20, 2014
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2nd Kooperative Innovationsprozesse group session meeting to be held at the Institut für Mikroelektronik Stuttgart
March 11, 2014
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3rd PRONTO workshop to be held at the Institut für Mikroelektronik Stuttgart
January 22, 2014
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The Ministerium für Finanzen und Wirtschaft funds the Institut für Mikroelektronik Stuttgart with 1,342,000 mio. Euros.
December 13, 2013
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16. Workshop der GMM – Fachgruppe 1.2.3 Abscheide- und Ätzverfahren, Erlangen
December 11, 2013
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Season´s Greetings
December 09, 2013
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International award has been awarded to a Ph. D. student from Stuttgart
December 08, 2013
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The ICT.OPEN 2013 Poster Award goes to the IMS
November 28, 2013
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ICT.OPEN 2013
November 27 - 28, 2013
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Forum "be-flexible" 2013 - Thin Semiconductor Devices, 14th International Workshop
November 20 - 21, 2013
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11th Workshop "Beams and More" 2013
November 07, 2013
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Business Medal awarded to Stuttgart´s Horst Fischer of the Institut für Mikroelektronik Stuttgart
November 06, 2013
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Ministerialdirektor Rolf Schumacher visits the IMS and presents funding notification
October 25, 2013
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PRONTO production platform presented at MST Congress 2013 in Aachen
October 14 - 16, 2013
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Microelectronics technology workshop
October 09 - 11, 2013
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Innovationsallianz Baden-Württemberg: Invitation to Bürgerfest
October 02 - 03, 2013
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Newsletter issue 2 2013
September 27, 2013
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ISCDG 2013 – IEEE International Semiconductor Conference Dresden Grenoble in Dresden
September 26 - 27, 2013
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SPIE Photomask Technology 33rd Annual Symposium 2013
September 10 - 12, 2013
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EMPC 2013 – European Microelectronics and Packaging Conference in Grenoble
September 09 - 12, 2013
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SMC - Practical course for students
July 15 - 26, 2013
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Ph. D. student from Stuttgart awarded international prize
July 15, 2013
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World record in photonic integration in silicon
July 01, 2013
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PRIME 2013 – 9th Conference on Ph. D. Research in Microelectronics and Electronics in Villach
June 24 - 27, 2013
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TRANSDUCERS' 2013 – The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
June 16 - 20, 2013
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TEMPERATUR 2013
June 05 - 06, 2013
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IEEE International Conference on Electron Devices and Solid-State Circuits (EDSSC 2013) in Hong Kong
June 03 - 05, 2013
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Newsletter issue 1 2013
May 14, 2013
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Smart Frame R&D Workshop at IMS
May 08, 2013
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MicroTEC Südwest: Cluster conference 2013
April 22 - 23, 2013
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Opening ceremony of the clean room expansion at the Institut für Mikroelektronik Stuttgart
April 22, 2013
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BMBF-sponsored KoSiF project launched - industry and research teaming up on bendable and autonomous sensor systems
March 27, 2013
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Attractive Science - Energie Innovation Exchange at the International Chamber of Commerce (IHK) in Villingen-Schwenningen
March 20, 2013
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IMS Chipfilm™ Technology publication in IEEE Spectrum
March 01, 2013
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5th Innovation forum for Mico Technology & SmartSystems in Villingen-Schwenningen
February 27, 2013
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Lecture "Ultra Thin Chips: A new paradigm in silicon technology?"
February 12 - 14, 2013
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49. MPC Workshop 2013 in Mannheim
February 08, 2013
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CEB Clean Energy Building 2013 in Stuttgart
February 07 - 09, 2013
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53. MPC Workshop 2015 in Esslingen
February 06, 2013
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"ASIC Lifecycle" seminar at the IMS on January 22nd, 2013
January 22, 2013
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Season´s Greetings
December 17, 2012
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The EXEPT project is awarded the CATRENE Innovation Award 2012
December 04, 2012
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µ-Probe project wrapped up successfully: Heatable steering plate fulfills expectations
November 30, 2012
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The HiDRaLoN project has been awarded the Demonstration Award 2012 during this year´s European Nanoelectronics Forum 2012
November 26, 2012
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Newsletter issue 2, 2012
October 30, 2012
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BMBF Project for New Chip Fabrication Technology Successfully Completed
October 29, 2012
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Successful progress of the HiDRaLoN project funded by the German Federal Ministry of Education and Research (BMBF)
October 22, 2012
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10th Workshop "Beams and More" 2012
October 18, 2012
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Microelectronics technology workshop
October 10 - 12, 2012
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The Director General of the Ministry of the Environment, Climate Protection and the Energy Sector, Helmfried Meinel, visited IMS CHIPS and inquired on the latest research developments
October 10, 2012
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Vienna-Tec 2012
October 09 - 12, 2012
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3rd Workshop - Packaging of PackMEMS 2012 Microsystems
October 02, 2012
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2nd PRONTO workshop to be held at the HSG-IMIT in Villingen-Schwenningen
September 26, 2012
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4th Electronics System ESTC 2012, Amsterdam
September 17 - 20, 2012
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42nd European Solid-State Device Research Conference (ESSDERC) in Bordeaux
September 17 - 21, 2012
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"Business-oriented Research Facilities" event series of the International Chamber of Commerce at IMS
September 13, 2012
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BMBF Project ETIK Leads to Enhancement of EUV Lithography
August 30, 2012
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SMC - Practical course for students
July 16 - 27, 2012
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IMS CHIPS at Reutlinger Innovationstage 2012
July 12, 2012
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MedTech Pharma 2012
July 04 - 05, 2012
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Specialized Workshop „Intelligent Light“ at the IMS
June 28, 2012
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METEC awarded with the VR-InnovationsPreis Mittelstand 2012 prize
June 20, 2012
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8th Conference on Ph.D. Research in Microelectronics & Electronics in Aachen
June 12 - 15, 2012
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PRONTO production platform presented at SENSOR+TEST 2012
May 22 - 24, 2012
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MicroTEC Südwest: Cluster conference 2012
May 14 - 15, 2012
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Control 2012 - The International Trade Fair for Quality Assurance
May 08 - 12, 2012
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Retina Implant airs on „Die Sendung mit der Maus“
April 25, 2012
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PRONTO at HANOVER Industrial Fair, Hall 17 Stand C48
April 23 - 27, 2012
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SPIE Photonics Europe 2012
April 16 - 19, 2012
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Newsletter issue 1 2012
April 05, 2012
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24V ASICs hitting the market
March 21, 2012
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7th International Conference on Integrated Power Electronics Systems (CIPS) 2012 in Nuremberg
March 06 - 08, 2012
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4th Innovation forum for Mico Technology in Villingen-Schwenningen
February 29, 2012
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Symposium "Elektronische Baugruppen und Leiterplatten EBL 2012" in Fellbach
February 14 - 15, 2012
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Topping-out ceremony at IMS CHIPS: Extension of Cleanroom Building
February 13, 2012
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Baden-Württemberg´s State Secretary Ingo Rust visits the IMS
January 31, 2012
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The 25th International Conference on Micro Electro Mechanical Systems IEEE MEMS 2012 - Paris, France
January 29 - February 02, 2012
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"Microsystems: Science meets education"
January 27 - February 10, 2012
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The Micronarc Alpine Meeting MAM 2012 - Villars-sur Ollon, Switzerland
January 24, 2012
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Season´s Greetings
December 17, 2011
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Recognition for METEC during the award of the Innovation Prize of Baden-Württemberg
November 24, 2011
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Forum "be-flexible" 2011 - Flexible Electronic Systems, 10th International Workshop
November 23, 2011
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The ICT.OPEN 2011 BEST POSTER AWARD goes to the IMS
November 15, 2011
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ICT.OPEN 2011
November 14 - 15, 2011
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HiDRaLoN 4. User Group Workshop
November 11, 2011
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9th Workshop "Beams and More" 2011
October 27, 2011
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Microelectronics technology workshop
October 12 - 14, 2011
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GMM-Prize 2011 awarded to Evangelos Angelopoulos, IMS CHIPS, on October 12, 2011
October 12, 2011
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PRONTO production platform presented at MST Congress 2011 in Darmstadt
October 10 - 12, 2011
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Newsletter issue 2 2011
September 30, 2011
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Semiconductor Conference Dresden (SCD)
September 27 - 28, 2011
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SPIE Photomask Technology 31st Annual Symposium 2011
September 19 - 22, 2011
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41st European Solid-State Device Research Conference (ESSDERC) in Helsinki
September 12 - 16, 2011
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IMS CHIPS Member of “eBeam Initiative”
September 12, 2011
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SMC - Practical course for students
July 18 - 29, 2011
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Day of the Innovation Alliance InnBW
July 14, 2011
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46. Heidelberger Bildverarbeitungsforum 2011, Kelheim near Regensburg
July 05, 2011
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Cluster Conference of the Spitzencluster MicroTEC Südwest
July 05 - 06, 2011
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First PRONTO workshop to be held at the Institut für Mikroelektronik Stuttgart
June 30, 2011
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Scientific Association of the Institut für Mikroelektronik Stuttgart e.V.
June 30, 2011
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PRONTO production platform presented at SENSOR+TEST 2011
June 07 - 09, 2011
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TRANSDUCERS' 11 – The 16th International Conference on Solid-State Sensors, Actuators and Microsystems
June 05 - 09, 2011
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TAE Business Breakfast – Competitive microsystem technology needs young talents
May 26, 2011
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"Microsystems: Science meets education"
May 23 - 31, 2011
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PRONTO production platform presented at SMT/HYBRID/PACKAGING 2011
May 03 - 05, 2011
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The HyperBraille display for the vision impaired opens new frontiers in education and business
April 28 - 30, 2011
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PRONTO at HANOVER Industrial Fair, Hall 6, Stand H18-E4
April 04 - 08, 2011
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German Microwave Conference 2011 in Darmstadt
March 14 - 16, 2011
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IMS CHIPS Standardizes on Cadence Silicon Realization Product Line for Advanced Gate Array Design
February 23, 2011
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ISSCC International Solid-State Circuits Conference 2011
February 20 - 24, 2011
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Ground breaking ceremony at IMS CHIPS : Extension of Cleanroom Building
February 15, 2011
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Nano Patterning Facility for Low/Mid Volume Production
February 14, 2011
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45. MPC Workshop 2011 in Albstadt-Sigmaringen
February 04, 2011
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Season´s Greetings
December 17, 2010
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New release Ultra-thin Chip Technology and Applications technical book
December 13, 2010
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"Microsystems: Science meets education"
December 07, 2010
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New Ultrathin Chip Fabrication Process Presented at IEDM 2010 in San Francisco
December 06 - 08, 2010
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Sensational medical success with IMS Retina Chip
December 02, 2010
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HiDRaLoN User Group Workshop
November 12, 2010
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Microsystem technology made in Baden-Württemberg: a story of success – also in the future!
October 15, 2010
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Microelectronics technology workshop
October 13 - 15, 2010
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"Embedded Systems & Smart Power" workshop
October 12, 2010
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PRONTO production platform at 4th Microsys fair in Stuttgart
September 13 - 16, 2010
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ESTC 2010, Berlin: Lecture "Packaging Challenges Associated with Warpage of Ultra-Thin Chips"
September 13 - 16, 2010
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Newsletter issue 2 2010
September 10, 2010
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Professional association of microelectronics IVAM joined
September 06, 2010
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SMC - Practical course for students
July 19 - 30, 2010
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8th Workshop "Beams and More" 2010
July 10, 2010
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The Landesforschungspreis für Angewandte Forschung goes to Professor Dr.-Ing. Joachim Burghartz in an award ceremony held in Stuttgart
July 08, 2010
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Chipfilm™ project completed successfull
June 29, 2010
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TanDEM-X - radar satellite liftoff from Baikkonur successful
June 21, 2010
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Science meets education: “Microchips”
June 21, 2010
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MoDekt – Final presentation on June 7, 2010 in Tuebingen
June 07, 2010
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IEEE EDS Mini-Kolloquium on June 7th, 2010
June 07, 2010
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54th International Conference on Electron, Ion, and Photon Beam Technology & Nanofabrication
June 01 - 04, 2010
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2. GMM Workshop — Technologien und Werkstoffe der Mikrosystem- und Nanotechnik
May 10 - 11, 2010
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New Braille display equipped with IMS ASICs at the SightCity 2010 in Frankfurt
April 28 - 30, 2010
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Professor Dr.-Ing. Joachim Burghartz of the Institut für Mikroelektronik Stuttgart is awarded the Landesforschungspreis für Angewandte Forschung
April 23, 2010
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Photomask and NGL Mask Technology XVII
April 13 - 15, 2010
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MEDEA+ Project FANTASTIC completed successfully!
April 11, 2010
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Newsletter issue 1 2010
March 26, 2010
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Joint project ValMon launched
February 09, 2010
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XLIII. MPC Workshop 2010 in Göppingen
February 05, 2010
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IMS CHIPS is awarded Spitzencluster MicroTEC Südwest
January 26, 2010
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Season´s Greetings
December 17, 2009
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Innovative learning media at IMS CHIPS
December 09, 2009
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Press release BMBF-Verbundprojekt HiDRaLoN
December 08, 2009
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Lecture "Anomalous Stress Effects in Ultra-Thin Silicon Chips on Foil"
December 07 - 09, 2009
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Again Paper Award at the SPIE Photomask Conference 2009 in Monterey, USA
December 07, 2009
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Science meets education: “Microchips”
November 30, 2009
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SAFE 2009 – Annual Workshop on Semiconductor Advances for Future Electronics and SENSORS
November 26 - 28, 2009
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8th International Conference on Nanoimprint and Nanoprint Technology
November 11 - 13, 2009
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First User Group Workshop within the scope of the HiDRaLoN project
November 06, 2009
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EDS Chapter Meeting on November 4th, 2009, in Reutlingen
November 04, 2009
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7th Workshop "Beams and More" 2009
October 22, 2009
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Microelectronics technology workshop
October 14 - 16, 2009
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Bipolar/BiCMOS Circuits and Technology Meeting (BCTM)
October 13 - 14, 2009
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IMS welcomes gifted youngsters
October 09, 2009
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Micro Nano Engeneering – MNE 2009
September 28 - October 01, 2009
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Newsletter issue 2 2009
September 25, 2009
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ESSDERC/ESSCIRC 2009, Athens: Lecture "Ultra-thin Chips - a New Paradigm in Silicon Technology"
September 14 - 18, 2009
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SPIE Photomask Technology 29th Annual Symposium (BACUS 2009)
September 14 - 17, 2009
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New technology development - medium-sized businesses gain access to Smart Power Chips
August 26, 2009
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EXEPT – 22 nm node EUV lithography
July 22, 2009
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SMC - Practical course for students
July 20 - 31, 2009
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Encore in federal cluster of excellence competition: MicroTEC Südwest in the final round again!
June 25, 2009
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TEMPERATUR 2009
June 24 - 25, 2009
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53rd International Conference on Electron, Ion, and Photon Beam Technology & Nanofabrication
May 26 - 29, 2009
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Project HiDRaLoN launched
May 24, 2009
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16th Symposium of the VDE/VDI “Mikrotechnik" workshop in Thüringen
May 19, 2009
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International Conference on IC Design & Technology
May 18 - 20, 2009
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New Braille display equipped with IMS ASICs at the SightCity 2009 in Frankfurt
May 13 - 15, 2009
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"Science and Technology" – classes at the IMS
April 21, 2009
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Hannover Fair, Hall 2 - Booth C21
April 20 - 24, 2009
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Photomask and NGL Mak Technology XVI
April 08 - 10, 2009
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Newsletter issue 1 2009
March 27, 2009
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SPIE Advanced Lithography 2009
February 22 - 27, 2009
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IMS CHIPS research group receives ISSCC Jack Raper Award
February 09, 2009
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XLI. MPC Workshop 2009 in Künzelsau
February 06, 2009
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New Collaboration in the Nanoimprint Lithography Industry
January 27, 2009
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Season´s Greetings
December 17, 2008
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Lecture "CMOS Imager Technologies for Biomedical Applications"
December 16, 2008
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Lecture "Ultra-thin Chips - a New Paradigm in Silicon Technology"
December 10 - 11, 2008
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Forum "be-flexible" 2008 - Thin Semiconductor Devices, 9th International Workshop
December 02, 2008
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SAFE 2008 – Annual Workshop on Semiconductor Advances for Future Electronics and SENSORS
November 27 - 28, 2008
more ...
Microelectronics technology workshop
November 14 - 29, 2008
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5. GMM-Workshop - Energieautarke Sensorik
November 12 - 13, 2008
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The IMS exhibits at VISION 2008 fair in Stuttgart
November 04 - 06, 2008
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4th Global Plastic Electronics Conference and Showcase
October 27 - 29, 2008
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IMS CHIPS and Robert Bosch signed contract
October 24, 2008
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6th Workshop "Masks and More" 2008
October 23, 2008
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HDRC® -Imager Workshop 2008
October 16, 2008
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Poster Award at the SPIE Photomask Conference 2008 in Monterey, USA
October 10, 2008
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SPIE Photomask Technology 28th Annual Symposium (BACUS 2008)
October 06 - 10, 2008
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Newsletter issue 2 2008
September 26, 2008
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U.R.S.I. Kleinheubacher Tagung 2008
September 22 - 25, 2008
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IMS CHIPS at Motek 2008
September 22 - 25, 2008
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IISB Lithography Simulation Workshop
September 18 - 20, 2008
more ...
Sponsoring of the IMS hands-on course for students
August 04, 2008
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SMC - Practical course for students
July 14 - 25, 2008
more ...
25 Years Institut für Mikroelektronik Stuttgart
July 09, 2008
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ASIC workshop 2008
May 27, 2008
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Hannover Fair, Hall 2 - Booth C21
April 21 - 25, 2008
more ...
SPIE Photonics Europe 2008
April 07, 2008
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EU project MAGIC launched
March 28, 2008
more ...
Newsletter issue 1 2008
March 27, 2008
more ...
Image Sensors Europe, Conference
March 19 - 20, 2008
more ...
MicroTEC Südwest in the finals
March 11, 2008
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hema presenting the HDRC® image sensor "seelector ICAM"
March 04, 2008
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IMS CHIPS at SPIE Advanced Lithography 2008
February 24 - 29, 2008
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New GFQ master
February 05, 2008
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ISSCC International Solid-State Circuits Conference 2008
February 03 - 07, 2008
more ...
Closing Event: "Idea to Product"
January 14, 2008
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Season´s Greetings
December 16, 2007
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Germany's Federal Criminal Police Office (BKA) publishes the final report "Authentizität digitaler Bilder II" ("Authenticity of Digital Images - Part II") by IMS
December 10, 2007
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ABBILD - BMBF project wrapped up successfully!
November 30, 2007
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The IMS exhibits at Innovation Fair & Congress 07
November 29, 2007
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Article in Photonik magazine on the application "Thin-Film-on-CMOS
November 15, 2007
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The IMS exhibits at VISION 2007 fair in Stuttgart
November 06 - 08, 2007
more ...
5th Workshop "Masks and More" 2007
October 26, 2007
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SPIE Photomask Technology 27th Annual Symposium (BACUS 2007)
September 17 - 21, 2007
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Chipfilm joint project launched
August 28, 2007
more ...
SMC - Practical course for students
July 16 - March 27, 2007
more ...
New HyperBraille user interface for the blind and the vision impaired
July 09, 2007
more ...
Successful launch for TerraSAR-X – Microchips from Stuttgart on Board
June 15, 2007
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Nanoimprint Lithography - Project FANTASTIC
June 14, 2007
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IMS CHIPS exhibits at MiNaT 2007
June 12 - 14, 2007
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Conference programme 13th SENSOR Conference
May 22, 2007
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6th Annual Mechatronics Day in Göppingen
May 09, 2007
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Photomask Japan 2007
April 17 - 20, 2007
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Hannover Fair, Hall 2 - Booth C19
April 16 - 20, 2007
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Advanced Night Vison Systems - NIRWARN
April 05, 2007
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We present our IMS newsletter
April 02, 2007
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Welcome back after our Relaunch!
March 14, 2007
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33. Bildverarbeitungsforum in Mannheim
March 06, 2007
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Website relaunch
March 04, 2007
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VIP Innovations-Workshop
March 01, 2007
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Article in Spiegel magazine on HDR photography
March 01, 2007
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Retina Implant
February 22, 2007
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SafetyEYE® - a safe look with HDRC® image sensors
February 22, 2007
more ...
Intensive Course Microelectronic Technology
February 19 - 22, 2007
more ...
New ultra-thin chip fabrication process
December 12, 2006
more ...
International Electron Devices Meeting
December 11, 2006
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Best Paper Award at Photomask Japan 2006
November 21, 2006
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Brilliant recording with high-dynamic digital camera, optimized signal processing and rendering with a new type of display.
November 21, 2006
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Workshop on ''Microhandling''
October 31, 2006
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Lithography Workshop 2006
October 26, 2006
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IMS at the fair VISION 2006 in Stuttgart
October 23 - November 09, 2006
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Intensive Course Microelectronic Technology
July 31 - August 04, 2006
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Microchips - a Hands-on Course for Students
July 24 - August 04, 2006
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''Sensor technology - the way to the future''
May 22, 2006
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Workshop ''New Applications in Silicon Technology''
May 17, 2006
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MORE than Moore – New Applications in Silicon Technology
May 08, 2006
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Exhibition at the Solar Information Center in Freiburg/Brsg., Germany, by members of the Baden-Wuerttemberg Association for Mircrosystem Technology (MST BW)
May 04, 2006
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Hannover Fair, Hall 2 - Booth C19
April 24 - 28, 2006
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Lecture on Semiconductor Technology 2
April 05, 2006
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European project IVP successfully completed
March 06, 2006
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Intensive Course Microelectronic Technology
February 20 - 24, 2006
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Prof. Dr. J. Burghartz has been appointed new director at IMS
October 01, 2005
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The first eight EUV fullfield masks have been manfactured for ASML
August 10, 2005
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