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Webinar IMS CHIPS 2020

November 19, 2020

On 19 November 2020 IMS CHIPS organized a free Webinar with IMS experts.
Due to the worldwide Covid 19 situation, the 18th Beams & More workshop, which was scheduled for November 19, could not take place.

The presentations cover highlights like results from our new laser writer, the extension of our photonic activities or current process developments at IMS CHIPS.


  • HIMT ULTRA - a new state-of-the-art Laser Writer at IMS CHIPS – Holger Sailer
  • Datafiles and -formats for Lithography at IMS CHIPS – Stephan Martens
  • Silicon Photonics: Integrated photonics for sensing applications – Mathias Kaschel
  • HySiF – Hybrid Systems in Foil – Björn Albrecht
  • Silicon energy filters for single step implantations of SiC substrates – Tamas Steinbach
  • Si (111) deep etching for GaN applications – Matthias Moser
  • Closing remarks/Outlook 2021 – Julian Hartbaum