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Deutscher Zukunftspreis 2020 for EUV technology

November 24, 2020

The Baden-Württemberg Minister of Economic Affairs congratulates companies on award

Minister of Economic Affairs, Dr. Nicole Hoffmeister-Kraut, has congratulated the Zeiss company in Oberkochen and the Ditzingen-based Trumpf company on being awarded the Deutscher Zukunftspreis 2020 by the German president.
"With their outstanding research work, Zeiss and Trumpf, together with the Dutch company ASML and many other partners, have succeeded in making decisive progress in the production of modern microchips. They have thus overcome an important hurdle on the way to faster processing of large amounts of data in artificial intelligence applications. Being awarded the Zukunftspreis is proof of the outstanding innovative strength of Baden-Württemberg's industry and business-related research facilities," said the Minister today (November 26th). The Zeiss company works in a close partnership with the Institut für Mikroelektronik Stuttgart (IMS CHIPS).

In contrast to conventional optical lithography, the EUV imaging system from ZEISS is not based on lenses but on mirrors. These high-precision mirrors from Oberkochen can have a diameter of up to one meter and require curvature accuracies in a nanometer range. In order to be able to measure these mirrors, individually manufactured high-precision Computer Generated Holograms (CGHs) are required, which are produced at Institut für Mikroelektronik Stuttgart (IMS CHIPS) using a unique technology. With their state-of-the-art equipment, such as electron beam writers and dedicated experts, it is possible at IMS CHIPS to also provide very large quartz substrates with structure sizes in the range below 100 nanometers. This in turn enables ZEISS to measure mirrors of the most diverse geometries with the required precision. IMS CHIPS, a member of the Innovationsallianz Baden-Württemberg (innBW), is one of ZEISS' key partners.

Press release of the Minister of Economic Affairs, Dr. Nicole Hoffmeister-Kraut on the German Future Prize

Further reference:
Deutscher Zukunftspreis
Press Release Bundesforschungsministeriums
Press Release Trumpf
Press Release ZEISS