The IMS will have 3 poster presentations on the SAFE 2008 in Veldhoven, Netherlands.
"Porous Silicon for Micro- and Opto-electronic applications: Fabrication technology and post-processing steps"
E. Angelopoulos, S. Ferwana, C. Harendt,
M. Zimmermann, W. Appel and J. Burghartz
"Ultra-Thin Chip Fabrication and Assembly Process"
Martin Zimmermann, Saleh Ferwana, Christine Harendt, Wolfgang Appel and Joachim N. Burghartz
"Accurate Measurement of Piezocoefficients in CMOS Transistors on Conventional and Ultra-Thin Silicon Chips"
N. Wacker, H. Rempp, S. Schmiel and J.N. Burghartz
For further information, please go to