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53rd International Conference on Electron, Ion, and Photon Beam Technology & Nanofabrication

May 26 - 29, 2009

The IMS will be giving an "Invited Talk" at the EIPBN 2009 in Florida, USA.


Mathias Irmscher
May 28, 10:50AM / Session 4A /Maskless Lithography

Programmable Aperture Plate System With Integrated CMOS Electronics for Projection Maskless Nanolithography and Nanopatterning
Christof Klein*, Elmar Platzgummer*, Hans Loeschner*, Florian Letzkus**, Michael Jurisch**, Mathias Irmscher**, Martin Witt***, Wolfgang Pilz***

* IMS Nanofabrication – Vienna, Austria
** IMS Chips – Stuttgart, Germany
*** FhG ISiT – Itzehoe, Germany

In addition, the IMS is represented at this year´s EIPBN with a booth (booth no. 2).

For further information, please go to www.eipbn.org

Location: Marco Island Marriott Beach Resort, Florida, USA; (booth no. 2)