UV-NIL stamp manufacturing at IMS CHIPS.
The Project FANTASTIC launched in August 2006 and funded by the BMBF has successfully been completed.
Within FANTASTIC the potential of UV nanoimprint lithography (UV-NIL) for the manufacturing of advanced CMOS devices has been investigated.
The Institut für Mikroelektronik Stuttgart was responsible for the work-package „template fabrication“ and developed manufacturing technologies for simple 2D up to complex 3D multi-layer structures with different etch depths.
IMS CHIPS now offers manufacturing of stamps with various form factors for different applications in microelectronics, micro- and nanoelectromechanical systems, nanooptics and nanophotonics.
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