Baden-Württemberg´s Minister of Finance and Economy, Dr. Nils Schmid, and Stuttgart´s mayor, Fritz Kuhn, to inaugurate the new clean room.
After 2 years construction the new clean room at Institut für Mikroelektronik Stuttgart will be inaugurated in an opening ceremony on April 22nd. The inauguration will also include the newly acquired electron beam writer. The state of Baden-Württemberg is supporting the facility and equipment expansion with a total of 14.7 mio. Euros. The Institut für Mikroelektronik Stuttgart holds a leading position in nano structuring and the research and development of new micro chip and nano structure processing. The new clean room expansion increases the facility´s production area for semiconductors and other optical components by more than 50 %. The new "e-beam writer", being the third of its kind in the facility´s history, will guarantee the research institute´s future contribution to the development and manufacture of highly-precise optical components as well as the growing demands of the semiconductor sector.
Opening ceremony press release