We present our IMS newsletter.
In this newsletter (issue 1, 2013) we would like to give you some highlights of our ongoing activities at the Institut fuer Mikroelektronik Stuttgart. The topics of the current issue are:
Opening ceremony of the clean room expansion at the IMS
After 2 years construction the new clean room at Institut für Mikroelektronik Stuttgart was inaugurated by the Minister of Finance and Economy, Dr. Nils Schmid, and the Stuttgart Mayor, Fritz Kuhn, in an opening ceremony on April 22nd. The inauguration also included the newly acquired electron beam writer.
µ-Probe, heatable steering plates for test cards
Silicon components with highly-precise micro structures open new possibilities in precision engineering: Newly-developed silicon steering plates with heating elements were integrated into test cards and successfully probed in a wafer tester. Using this technology precision-testing the next generation´s silicon chips is possible at different temperaturess.
Optical Elements for New Surface Metrology
The technology of high end novel optical elements as an essential part of precision EUV optics metrology has been developed at IMS. The work has been funded by the BMBF as a part of the German project „EUV-Lithografie für den 22-Nanometer-Knoten“, which was embedded in the European project EXEPT.
After the successful conclusion the EXEPT project has won the CATRENE Innovation Award 2012.
Guide to State-of-the-Art Electron Devices
Guide to State-of-the-Art Electron Devices marks the 60th anniversary of the IRE electron devices committee and the 35th anniversary of the
IEEE Electron Devices Society, as such it defines the state-of-the-art of electron devices, as well as future directions across the entire field.
Our current IMS Newsletter can be found under Publications - Current publications.