The end of 2014 saw the installation and launch of a VPG400 laser direct writer at the IMS made by Heidelberg Instruments Mikrotechnik and financed by the Ministeriums für Finanzen und Wirtschaft Baden-Württemberg and funds from the European Regional Development Fund (ERDF). This writer generates maskless micro structure on a variety of materials, such as wafers, quartz plates or ceramic and plastics substrates. This opens a whole new variety of perspectives for research as such as well as the development of prototypes: the exposed structures have a significantly higher expansion than micro chips while the individual structures are less than one micrometer in dimension. Work on new solutions for chips in foil, complex MEMS components and hybrid systems is expedited much faster and more efficient.
Further information is included in the press release: PM_Laserdirektschreiber_2015.pdf
"Regional competitiveness and employment"
European Union – European Regional Development Fund