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The 61st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

May 30 - June 02, 2017

The IMS will have a poster presentation on the EIPBN 2017 in Orlando, USA.

Poster Session – Session 1 & Best Poster Competition and Session 2
Mittwoch, den 31.05.2017, 10:30 AM and 5:45 PM

Electron-beam Exposure Dependent and Adjustable Sidewall Slopes of PMMA and ZEP520A in Comparison

Corinna Kaspar, Joerg Butschke, Mathias Irmscher, Stephan Martens, Joachim Burghartz, Vitaliy Guzenko, Robert Kirchner and Helmut Schift

For more information, please refer to:

Location: Walt Disney World Coronado Springs Resort, 1000 Buena Vista Drive, Lake Buena Vista, Orlando, FL, USA