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45th International Conference on Micro & Nano Engineering 2019

September 23 - 26, 2019

The IMS will have a poster presentation on the MNE 2019 in Rhodes, Greece.

Thematic area C: September 25th, 14.15

Large area Silicon-energy filters for ion implantation

Steinbach T.1, Csato C.2, Krippendorf F.2, Letzkus F.1, Rüb M.2,3, Burghartz J.1

1 Institut Für Mikroelektronik Stuttgart (IMS-CHIPS), Stuttgart, Germany, 2 mi2-factory GmbH, Jena, Germany, 3 Ernst-Abbe-Hochschule Jena, Jena, German

For more information, please refer to:

Location: Rodos Palace Hotel, Iraklidon Avenue, 85100 Rhodes, Greece