{"id":983,"date":"2020-09-11T15:39:35","date_gmt":"2020-09-11T13:39:35","guid":{"rendered":"https:\/\/start.ims-chips.de\/?page_id=983"},"modified":"2025-04-22T14:03:22","modified_gmt":"2025-04-22T12:03:22","slug":"nanostrukturierung","status":"publish","type":"page","link":"https:\/\/www.ims-chips.com\/?page_id=983","title":{"rendered":"Nanopatterning"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"983\" class=\"elementor elementor-983\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-351bb3d elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"351bb3d\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;,&quot;shape_divider_bottom&quot;:&quot;curve&quot;,&quot;shape_divider_bottom_negative&quot;:&quot;yes&quot;}\">\n\t\t\t\t\t\t\t<div class=\"elementor-background-overlay\"><\/div>\n\t\t\t\t\t\t<div class=\"elementor-shape elementor-shape-bottom\" aria-hidden=\"true\" data-negative=\"true\">\n\t\t\t<svg xmlns=\"http:\/\/www.w3.org\/2000\/svg\" viewBox=\"0 0 1000 100\" preserveAspectRatio=\"none\">\n\t<path class=\"elementor-shape-fill\" d=\"M500,97C126.7,96.3,0.8,19.8,0,0v100l1000,0V1C1000,19.4,873.3,97.8,500,97z\"\/>\n<\/svg>\t\t<\/div>\n\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-531617f3 exad-glass-effect-no exad-sticky-section-no\" data-id=\"531617f3\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-37b1b54 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"37b1b54\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-small\">Nanopatterning<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-30a70ee3 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"30a70ee3\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-wide\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-3b73c05b exad-glass-effect-no exad-sticky-section-no\" data-id=\"3b73c05b\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-b1c94a1 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"b1c94a1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"608\" height=\"389\" src=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2020\/09\/GF_5_Nano_20140213_Ebeam_Vistec_SB4050_IMG_1370_klein.jpg\" class=\"attachment-large size-large wp-image-1234\" alt=\"Employees in the cleanroom doing scientific work\" srcset=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2020\/09\/GF_5_Nano_20140213_Ebeam_Vistec_SB4050_IMG_1370_klein.jpg 608w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2020\/09\/GF_5_Nano_20140213_Ebeam_Vistec_SB4050_IMG_1370_klein-300x192.jpg 300w\" sizes=\"(max-width: 608px) 100vw, 608px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-40e11d8c exad-glass-effect-no exad-sticky-section-no\" data-id=\"40e11d8c\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-465e0f06 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-icon-box\" data-id=\"465e0f06\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-box.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-icon-box-wrapper\">\n\n\t\t\t\n\t\t\t\t\t\t<div class=\"elementor-icon-box-content\">\n\n\t\t\t\t\n\t\t\t\t\t\t\t\t\t<p class=\"elementor-icon-box-description\">\n\t\t\t\t\t\tIMS CHIPS looks back on more than 30 years of experience in the field of electron beam lithography for the production of high-resolution, complex structures. We are currently working with the third generation equipment, consisting of two shape beam writers from Vistec for substrate sizes between 150 mm and 450 mm. Using the appropriate equipment, as an example of our range of products, we manufacture nano-imprint masters, optical elements and masks for the highest demands at an industrial level. <br>\nTo complement electron beam lithography, we operate two laser direct write systems (resolution up to 0.7um) and an I-line stepper (resolution up to 0.4um). These are also mix-and-match compatible with our electron beam writers and thus allow a cost-efficient implementation of patterns with different resolution requirements.<br>\nWe\u00b4ll gladly evaluate the implementation of special customer requirements or develop processes tailored to the respective application. Contact us!\n\t\t\t\t\t<\/p>\n\t\t\t\t\n\t\t\t<\/div>\n\t\t\t\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9b54cd8 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"9b54cd8\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-3381303 exad-glass-effect-no exad-sticky-section-no\" data-id=\"3381303\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-58cc6fe elementor-icon-list--layout-inline elementor-list-item-link-full_width exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-icon-list\" data-id=\"58cc6fe\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items elementor-inline-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-inline-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.ims-chips.com\/?page_id=3189\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-dot-circle\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Silicon Photonics<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-inline-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.ims-chips.com\/?page_id=947\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-dot-circle\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Integrated circuits &amp; systems<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item elementor-inline-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.ims-chips.com\/?page_id=980\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-dot-circle\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">M(E)MS technology<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-eee9944 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"eee9944\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-a358ba9 exad-glass-effect-no exad-sticky-section-no\" data-id=\"a358ba9\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-2c54ad8 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"2c54ad8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h5 class=\"elementor-heading-title elementor-size-default\">Our idea - our mission<\/h5>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f258458 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"f258458\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><span>In close cooperation with our customers, we develop technologies, processes and components. The developed products can be qualified in our technology department and, if desired, manufactured as a single product or certified in a small series. <\/span><\/p><p><span>In cooperation with equipment and material manufacturers, we evaluate their products in our line so that they can be demonstrated to potential customers. For example, our partner Heidelberg Instruments uses the IMS clean room to demonstrate the ULTRA laser writer.<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-8b3803d elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"8b3803d\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-09928e6 exad-glass-effect-no exad-sticky-section-no\" data-id=\"09928e6\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-966e5f2 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"966e5f2\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"750\" height=\"520\" src=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/20140213_Ebeam_Vistec_SB4050_IMG_1386-1024x710.jpg\" class=\"attachment-large size-large wp-image-5989\" alt=\"Ebeam_Vistec_SB4050\" srcset=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/20140213_Ebeam_Vistec_SB4050_IMG_1386-1024x710.jpg 1024w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/20140213_Ebeam_Vistec_SB4050_IMG_1386-300x208.jpg 300w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/20140213_Ebeam_Vistec_SB4050_IMG_1386-768x533.jpg 768w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/20140213_Ebeam_Vistec_SB4050_IMG_1386-600x416.jpg 600w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/20140213_Ebeam_Vistec_SB4050_IMG_1386-1536x1065.jpg 1536w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/20140213_Ebeam_Vistec_SB4050_IMG_1386-2048x1421.jpg 2048w\" sizes=\"(max-width: 750px) 100vw, 750px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-a7c3584 exad-glass-effect-no exad-sticky-section-no\" data-id=\"a7c3584\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-3d1e9da exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"3d1e9da\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"750\" height=\"524\" src=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/EUV_Maske_-M0506-42_IMG_1721-1024x715.jpg\" class=\"attachment-large size-large wp-image-5988\" alt=\"Employees in the cleanroom doing scientific work\" srcset=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/EUV_Maske_-M0506-42_IMG_1721-1024x715.jpg 1024w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/EUV_Maske_-M0506-42_IMG_1721-300x209.jpg 300w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/EUV_Maske_-M0506-42_IMG_1721-768x536.jpg 768w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/EUV_Maske_-M0506-42_IMG_1721-600x419.jpg 600w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/EUV_Maske_-M0506-42_IMG_1721-1536x1073.jpg 1536w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/EUV_Maske_-M0506-42_IMG_1721-2048x1430.jpg 2048w\" sizes=\"(max-width: 750px) 100vw, 750px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-b1da03f exad-glass-effect-no exad-sticky-section-no\" data-id=\"b1da03f\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-cd148f9 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"cd148f9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h5 class=\"elementor-heading-title elementor-size-default\">Contact<\/h5>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-26ed23a elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"26ed23a\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-3b946fa exad-glass-effect-no exad-sticky-section-no\" data-id=\"3b946fa\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-806de86 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"806de86\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h5 class=\"elementor-heading-title elementor-size-default\">Julian Hartbaum<\/h5>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2d7b14a exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"2d7b14a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\tPhone: 0711 21855 471<br>\nemail:<a href=\"mailto:hartbaum@ims-chips.de\"> Julian Hartbaum<\/a>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-db99158 exad-glass-effect-no exad-sticky-section-no\" data-id=\"db99158\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-a46ec49 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"a46ec49\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"750\" height=\"938\" src=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/20210120_JH_MG_9534.jpg\" class=\"attachment-large size-large wp-image-5860\" alt=\"Dr. J. Hartbaum\" srcset=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/20210120_JH_MG_9534.jpg 768w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/20210120_JH_MG_9534-240x300.jpg 240w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/20210120_JH_MG_9534-600x750.jpg 600w\" sizes=\"(max-width: 750px) 100vw, 750px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-2298e0f exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"2298e0f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>In close cooperation with our customers, we develop technologies, processes and components. The developed products can be qualified in our technology department.<\/p><p>In cooperation with equipment and material manufacturers, we evaluate their products in our line so that they can be demonstrated to potential customers. For example, our partner AP&amp;S uses the IMS clean room to demonstrate the \u201cMultistep\u201d cleaner.<\/p><p>The IMS offers position measurements on the LMS-IPRO as one of our many services to you.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-755de67 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"755de67\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-fdbe040 exad-glass-effect-no exad-sticky-section-no\" data-id=\"fdbe040\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-4a91b82 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"4a91b82\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h5 class=\"elementor-heading-title elementor-size-default\">Product samples<\/h5>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1a5ec95 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"1a5ec95\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h6 class=\"elementor-heading-title elementor-size-default\">Nano-Imprint Templates<\/h6>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-033cd98 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"033cd98\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><span>We manufacture replication masters based on silicon wafers, quartz wafers, mask blanks or SOI wafers. RIE and ICP processes, as well as Bosch and cryo-etching processes are available as structure transfer technologies. Subsequent surface treatments allow the masters to be professionally cleaned, smoothed and provided with a non-stick coating.<\/span><\/p><p><span>Wafers can be separated on request. Form factors thus range from a few mm\u00b2 to 230\u00a0x\u00a0230\u00a0mm\u00b2. <\/span><\/p><p><span>In addition to binary structures, multi-level, mesa structures and, in photo resist, 3D analog structures can be realized.<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-e39d904 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"e39d904\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-94e1611 exad-glass-effect-no exad-sticky-section-no\" data-id=\"94e1611\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-ed31c73 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"ed31c73\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"467\" height=\"288\" src=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/500nm_pillars_1_5\u00b5m_height_Ausschnitt_Web.jpg\" class=\"attachment-large size-large wp-image-7826\" alt=\"500nm pillars 1,5\u00b5m height Ausschnitt\" srcset=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/500nm_pillars_1_5\u00b5m_height_Ausschnitt_Web.jpg 467w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/500nm_pillars_1_5\u00b5m_height_Ausschnitt_Web-300x185.jpg 300w\" sizes=\"(max-width: 467px) 100vw, 467px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-4df0226 exad-glass-effect-no exad-sticky-section-no\" data-id=\"4df0226\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-4ab38fd exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"4ab38fd\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"467\" height=\"288\" src=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/1_2.jpg\" class=\"attachment-large size-large wp-image-7825\" alt=\"\" srcset=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/1_2.jpg 467w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/1_2-300x185.jpg 300w\" sizes=\"(max-width: 467px) 100vw, 467px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-a640b1a exad-glass-effect-no exad-sticky-section-no\" data-id=\"a640b1a\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-37fdcdf exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"37fdcdf\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong><span>Additional information<\/span><\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4a1af4a elementor-icon-list--layout-traditional elementor-list-item-link-full_width exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-icon-list\" data-id=\"4a1af4a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2025\/04\/IMS_Stamps_Flyer_2025_en_web.pdf\" target=\"_blank\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"far fa-file-pdf\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Master Stamps <\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.ims-chips.com\/download\/Individual_technology_processes.pdf\" target=\"_blank\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"far fa-file-pdf\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">A complete list of all semiconductor processes aviable at the IMS CHIPS<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-dd5f4ee elementor-icon-list--layout-traditional elementor-list-item-link-full_width exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-icon-list\" data-id=\"dd5f4ee\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/beams-and-more.ims-chips.de\/\" target=\"_blank\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"icon icon-link\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">Workshop \"Beams &amp; More\"<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-7886a48 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-spacer\" data-id=\"7886a48\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d367555 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"d367555\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><strong>Current projects<\/strong><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-53078e8 elementor-icon-list--layout-traditional elementor-list-item-link-full_width exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-icon-list\" data-id=\"53078e8\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"icon-list.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<ul class=\"elementor-icon-list-items\">\n\t\t\t\t\t\t\t<li class=\"elementor-icon-list-item\">\n\t\t\t\t\t\t\t\t\t\t\t<a href=\"https:\/\/www.ims-chips.com\/?p=1659\">\n\n\t\t\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-icon\">\n\t\t\t\t\t\t\t<i aria-hidden=\"true\" class=\"icon icon-right-arrow\"><\/i>\t\t\t\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t\t<span class=\"elementor-icon-list-text\">TAPES3 - Technology Advances for Pilotline of Enhanced Semiconductors for 3 nm<\/span>\n\t\t\t\t\t\t\t\t\t\t\t<\/a>\n\t\t\t\t\t\t\t\t\t<\/li>\n\t\t\t\t\t\t<\/ul>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-72cbef6 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"72cbef6\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-91fa7c5 exad-glass-effect-no exad-sticky-section-no\" data-id=\"91fa7c5\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-ad00c30 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"ad00c30\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h6 class=\"elementor-heading-title elementor-size-default\">Optical Elements<\/h6>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5c59cd4 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"5c59cd4\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><span>Many customers with optical applications take advantage of our ability to precisely pattern complex structures in quartz glass even in the sub-micrometer range.<\/span><\/p><p><span>150\u00a0mm or 200\u00a0mm quartz wafers or square mask substrates in sizes 6&#8221; (6025) and 9&#8221; (9035) serve as a basis. Lines for round 12&#8221; or 17&#8221; substrates are available for special applications.<\/span><\/p><p><span>Typical applications are Fresnel lenses, microlens arrays or diffractive optical elements. <\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-17f34bb exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"17f34bb\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"546\" height=\"356\" src=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/Fresnellinse_Web.jpg\" class=\"attachment-large size-large wp-image-7835\" alt=\"Fresnellinse\" srcset=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/Fresnellinse_Web.jpg 546w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/Fresnellinse_Web-300x196.jpg 300w\" sizes=\"(max-width: 546px) 100vw, 546px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-223eba1 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-spacer\" data-id=\"223eba1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-6659f8a exad-glass-effect-no exad-sticky-section-no\" data-id=\"6659f8a\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4f23d01 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"4f23d01\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-103d415 exad-glass-effect-no exad-sticky-section-no\" data-id=\"103d415\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-8dec84b exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"8dec84b\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h6 class=\"elementor-heading-title elementor-size-default\">Masks<\/h6>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a5ba95f exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"a5ba95f\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>MS has been operating its own mask line for over 15 years. The equipment allows the processing of binary as well as phase-shifted masks in the 6025 and 9035 formats. On the one hand, we offer a solution from a single source to our customers, however, we also use the processes for other applications based on masks<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-6912efb exad-glass-effect-no exad-sticky-section-no\" data-id=\"6912efb\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-55f411f elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"55f411f\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;animation&quot;:&quot;none&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-2d4c9eb exad-glass-effect-no exad-sticky-section-no\" data-id=\"2d4c9eb\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-27d11f7 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"27d11f7\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h5 class=\"elementor-heading-title elementor-size-default\">Resist technology<\/h5>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-31181e6 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"31181e6\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><span>For an electron lithographic implementation of high-resolution and complex structures at an acceptable throughput, we are continuously evaluating resists for e-beam applications together with our suppliers and potential users and are developing processes with selected samples.<\/span><\/p><p><span>The resists are evaluated for their performance parameters, such as resolution, stability, and sensitivity, and the processes are tailored to the specific application.<\/span><\/p><p><span>To eliminate charging effects during the e-beam exposure, combinations of resists with conductive layers have been successfully implemented.<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-62e09a4 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"62e09a4\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-3518a3a exad-glass-effect-no exad-sticky-section-no\" data-id=\"3518a3a\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-9bd0e2a exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"9bd0e2a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"373\" height=\"247\" src=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/Multi-layer_Structures_1_Web.jpg\" class=\"attachment-large size-large wp-image-7840\" alt=\"Multi-layer Structures\" srcset=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/Multi-layer_Structures_1_Web.jpg 373w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/Multi-layer_Structures_1_Web-300x199.jpg 300w\" sizes=\"(max-width: 373px) 100vw, 373px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-d2147d0 exad-glass-effect-no exad-sticky-section-no\" data-id=\"d2147d0\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-2875633 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"2875633\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"373\" height=\"247\" src=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/3D_Analog_Struktru.Web2_.jpg\" class=\"attachment-large size-large wp-image-7839\" alt=\"3D Analog Struktur\" srcset=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/3D_Analog_Struktru.Web2_.jpg 373w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/03\/3D_Analog_Struktru.Web2_-300x199.jpg 300w\" sizes=\"(max-width: 373px) 100vw, 373px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-6da2fa2 exad-glass-effect-no exad-sticky-section-no\" data-id=\"6da2fa2\" data-element_type=\"column\" data-e-type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>Nanopatterning IMS CHIPS looks back on more than 30 years of experience in the field of electron beam lithography for the production of high-resolution, complex structures. We are currently working with the third generation equipment, consisting of two shape beam writers from Vistec for substrate sizes between 150 mm and [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-templates\/template-pagebuilder-full-width.php","meta":{"footnotes":""},"class_list":["post-983","page","type-page","status-publish","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v28.5 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Nanopatterning - Institut f\u00fcr Mikroelektronik Stuttgart<\/title>\n<meta name=\"description\" content=\"We are currently working with the third generation equipment, consisting of two shape beam writers from Vistec for substrate sizes between 150 mm and 450 mm.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.ims-chips.com\/?page_id=983\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Nanopatterning - 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