{"id":5334,"date":"2021-02-02T12:08:50","date_gmt":"2021-02-02T11:08:50","guid":{"rendered":"https:\/\/start.ims-chips.de\/?p=5334"},"modified":"2022-09-27T09:30:29","modified_gmt":"2022-09-27T07:30:29","slug":"mst-kongress-2021","status":"publish","type":"post","link":"https:\/\/www.ims-chips.com\/?p=5334","title":{"rendered":"PanaMEA \u2013 Intelligent blood sugar level monitoring"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"5334\" class=\"elementor elementor-5334\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-8e921d8 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"8e921d8\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-8898761 exad-glass-effect-no exad-sticky-section-no\" data-id=\"8898761\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-13410c2 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-heading\" data-id=\"13410c2\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">The Vistec SB255 electron beam lithography system will be procured from ERDF funds<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-026a2ab elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"026a2ab\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-58b6e31 exad-glass-effect-no exad-sticky-section-no\" data-id=\"58b6e31\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-c80fd93 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-image\" data-id=\"c80fd93\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"344\" height=\"211\" src=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/Highlight_Bild_Viste_E-Beam_SB255_22.jpg\" class=\"attachment-large size-large wp-image-9690\" alt=\"Viste E-Beam SB255 22\" srcset=\"https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/Highlight_Bild_Viste_E-Beam_SB255_22.jpg 344w, https:\/\/www.ims-chips.com\/wp-content\/uploads\/2021\/02\/Highlight_Bild_Viste_E-Beam_SB255_22-300x184.jpg 300w\" sizes=\"(max-width: 344px) 100vw, 344px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-601b950 elementor-section-boxed elementor-section-height-default elementor-section-height-default exad-glass-effect-no exad-sticky-section-no\" data-id=\"601b950\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-b69a4a7 exad-glass-effect-no exad-sticky-section-no\" data-id=\"b69a4a7\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-efc2801 exad-sticky-section-no exad-glass-effect-no elementor-widget elementor-widget-text-editor\" data-id=\"efc2801\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The REACT-EU grant approved to Institut f\u00fcr Mikroelektronik Stuttgart financed under the European Regional Development Fund (ERDF) \u2013 Innovation and Energy Transition \u2013 during the funding period 2014 \u2013 2020 is part of the European Union&rsquo;s response to the COVID-19 pandemic by the Administrative Regulation ERDF \u2013 Expansion of Innovation Capacities \u2013 EVI 2014 \u2013 2020 of the Ministry of Economics, Labor and Tourism.<\/p>\n<p>The grant is awarded by way of partial financing for project funding for the\u00a0<strong>Nanopatterning Cluster+\u00a0<\/strong>project<strong>.<\/strong><\/p>\n<p>The electron beam lithography system was purchased with the help of  funds from the European Union to support crisis management in connection with  the COVID-19 pandemic and its social consequences as well as the preparation of  a green, digital and stable recovery of the economy (REACT-EU), handed out  through the ERDF program Baden-W\u00fcrttemberg 2014-2020.<\/p>\n<p>The\u00a0<strong>Vistec SB255 electron beam lithography system<\/strong>\u00a0enables automatic exposure of masks up to 7\u00a0inches and wafers up to 200\u00a0mm in diameter. The so-called shaped beam technique is used, in which any rectangles and 45\u00b0 triangles with a maximum dimension of 2\u00a0\u00b5m\u00a0x\u00a02\u00a0\u00b5m can be exposed at once by electron-optical imaging of two apertures. This technique, in combination with &ldquo;write-on-the-fly&rdquo; and vector scan, enables significantly faster exposure of orthogonal and diagonal structures compared to point-beam recorders. Differently shaped structures are exposed in a correspondingly approximated manner. In addition, the system is equipped with the so-called cell projection. This allows for more complex design blocks with a maximum extension of 2\u00a0\u00b5m\u00a0x\u00a02\u00a0\u00b5m in the block to be exposed. Damit k\u00f6nnen auch komplexere Designbl\u00f6cke mit einer maximalen Ausdehnung von 2 \u00b5m x 2 \u00b5m im Block belichtet werden. The gain in writing time achieved with this writing method enables the production of structural geometries that were not feasible with the previous system.<\/p>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>The Vistec SB255 electron beam lithography system will be procured from ERDF funds The REACT-EU grant approved to Institut f\u00fcr Mikroelektronik Stuttgart financed under the European Regional Development Fund (ERDF) \u2013 Innovation and Energy Transition \u2013 during the funding period 2014 \u2013 2020 is part of the European Union&rsquo;s response [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":5335,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[10],"tags":[],"class_list":["post-5334","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-highlights"],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v28.5 - 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