Institut für Mikroelektronik Stuttgart


We research and develop innovative applications in micro electronics and nano technology. Being a member of the Innovation Alliance Baden-Württemberg, we engage in technological transfer to industry.
We combine university research and industrial applications by supporting reliable small-series production.


We are continuously engaged in a variety of exciting research projects
• Lithography processes
• Medical technology
• Optics and photonics
• Smart sensor technology
• Industry 4.0
• Artificial intelligence


With our below business areas we cover a broad spectrum of innovative microelectronics and nano technologies
• Integrated Circuits & Systems
• Silicon Photonics
• M(E)MS Technologies
• Nanostructuring


Join our team and get involved with exciting research topics. For students of various disciplines from universities and colleges, we continuously offer bachelor and master theses.



The Vistec SB255 electron beam lithography system will be procured from ERDF funds.

Within the framework of the future cluster “Qsens”, IMS CHIPS is involved in the projects QVOL, QSCALE and QIND. In these projects, work is to be done on the market introduction of quantum sensor technology.

IMS CHIPS as alliance partner for the production of next generation integrated circuits.

The Ministry of Economics, Labor and Tourism Baden-Württemberg is funding the joint project DoRiE.

Research Network